Junction fabrication by shadow evaporation without a suspended bridge

Nanotechnology

Volumn 22, Issue 31, 2011, Pages

  Lecocq, Florent ^a   Pop, Ioan M ^a   Peng, Zhihui ^a   Matei, Iulian ^a   Crozes, Thierry ^a   Fournier, Thierry ^a   Naud, Cécile ^a   Guichard, Wiebke ^a   Buisson, Olivier ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

BILAYER RESISTS; COHERENCE TIME; E-BEAM LITHOGRAPHY; ENERGY RELAXATION; HIGH QUALITY; HIGH VOLTAGE; IN-SITU FABRICATION; JOSEPHSON JUNCTIONS; JUNCTION SIZE; MECHANICAL ROBUSTNESS; PHASE QUBIT; PRECISE CONTROL; RESONANCE WIDTH; SHADOW EVAPORATION; SHADOW-EVAPORATION TECHNIQUE;

CAPACITORS; EVAPORATION; PHASE TRANSITIONS;

FABRICATION;

EID: 79960767954     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/22/31/315302     Document Type: Article

References (28)

1. Dolan G J 1977 Appl. Phys. Lett. 31 337-9
2. Grabert H and Devoret M (ed) 1992 Single Charge Tunneling, Coulomb Blockade Phenomena in Nanosctructures (New York: Plenum)
3. Yang T, et al 2008 Nature Phys. 4 851-4
4. Valenzuela S O and Tinkham M 2006 Nature 442 176-9
5. Clarke J and Braginski A I (ed) 2004 The SQUID Handbook (Weinhein: Wiley-VCH)
6. Taylor B N, Parker W H and Langenberg D N 1969 Rev. Mod. Phys. 41 375
7. Likharev K K 1986 Dynamics of Josephson Junctions and Circuits (New York: Gordon and Breach)
8. Giazotto F, et al 2006 Rev. Mod. Phys. 78 217
9. Korotkov A N (ed) 2009 Quantum computing with superconducting qubits Quantum Inf. Process. 8 51
10. Gurvitch M, et al 1983 Appl. Phys. Lett. 42 472-4
11. Dolata R, et al 2005 J. Appl. Phys. 97 054501
12. Pop I M 2011 Quantum phase-slips in Josephson junctions chains PhD Thesis Université de Grenoble (available at tel.archives-ouvertes.fr)
13. Hoskinson E, et al 2009 Phys. Rev. Lett. 102 097004
14. Fay A, et al 2008 Phys. Rev. Lett. 100 187003
15. Cord B and Aumentado J, et al 2006 J. Vac. Sci. Technol. B 24 3139
16. Rai-Choudhury P (ed) 1997 SPIE Handbook of Microlithography, Micromachining and Microfabrication vol 1 Microlithography (Bellingham, WA: SPIE Optical Engineering Press)
17. Yasin S 2002 Microelectron. Eng. 61/62 745-53
18. Ocola L E and Stein A 2006 J. Vac. Sci. Technol. B 24 3061
19. Claudon J, Fay A, Hoskinson E and Buisson O 2007 Phys. Rev. B 76 024508
20. Cooper K B, et al 2004 Phys. Rev. Lett. 93 180401
21. Lisenfeld J, et al 2010 Phys. Rev. B 81 100511(R)
22. Palomaki T A, et al 2010 Phys. Rev. B 81 144503
23. Steffen M, et al 2006 Phys. Rev. Lett. 050502
24. Yamamoto T, et al 2010 Phys. Rev. B 82 184515
25. Poletto S, et al 2009 New J. Phys. 11 013009
26. Altomare F, et al 2009 Nature Phys. 6 777-781
27. Potts A, et al 2001 IEE Proc., Sci. Meas. Technol. 148 225-8
28. Gladchenko S, et al 2009 Nature Phys. 5 48