CMOS compatible fabrication methods for submicron Josephson junction qubits

IEE Proceedings: Science, Measurement and Technology

Volumn 148, Issue 5, 2001, Pages 225-228

  Potts, A ^a   Parker, G J ^a   Baumberg, J J ^a   De Groot, P A J ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRON BEAM LITHOGRAPHY; MASKS; MULTILAYERS; OXIDE SUPERCONDUCTORS; QUANTUM THEORY; SUPERCONDUCTIVITY; TUNNEL JUNCTIONS;

SUBMICRON JOSEPHSON JUNCTION QUBITS;

JOSEPHSON JUNCTION DEVICES;

EID: 0035441123     PISSN: 13502344     EISSN: None     Source Type: Journal    
DOI: 10.1049/ip-smt:20010395     Document Type: Conference Paper

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