Nanoimprint patterning for tunable light trapping in large-area silicon solar cells

Solar Energy Materials and Solar Cells

Volumn 95, Issue 10, 2011, Pages 2886-2892

  Bessonov, Aleksander ^a   Cho, Youngtae ^a   Jung, Seung Jae ^a   Park, Eun Ah ^a   Hwang, Eun Soo ^a   Lee, Jong Woo ^a   Shin, Myunghun ^a   Lee, Sukwon ^a  

^a SAMSUNG Electronics   (South Korea)

Author keywords

Double texture; Light scattering; Pattern fidelity; Texture smoothing; Thin film solar cells; UV nanoimprint lithography

Indexed keywords

A-SI:H; DOUBLE TEXTURE; EXCELLENT PERFORMANCE; IDEAL SYSTEMS; INTERFACE MORPHOLOGIES; LIGHT-TRAPPING; NANO-IMPRINT; PATTERN FIDELITY; PHOTOVOLTAIC CHARACTERISTICS; POLYMER STRUCTURE; POLYMERIC LAYERS; TANDEM SOLAR CELLS; THIN FILM SOLAR CELLS; THIN-FILM SILICON SOLAR CELLS; TRANSPARENT CONDUCTIVE OXIDES; UV NANOIMPRINT LITHOGRAPHY;

FILM GROWTH; GROWTH KINETICS; LIGHT SCATTERING; OPTICAL PROPERTIES; POLYMERS; REFRACTION; SEMICONDUCTING SILICON COMPOUNDS; SILICON SOLAR CELLS; SOLAR POWER GENERATION; TEXTURES; THIN FILMS;

NANOIMPRINT LITHOGRAPHY;

EID: 79960556843     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2011.06.007     Document Type: Article

References (47)

1. A.G. Aberle Thin-film solar cells Thin Solid Films 517 2009 4706 4710
2. I. Gordon, L. Carnel, D. Van Gestel, G. Beaucarne, and J. Poortmans 8% efficient thin-film polycrystalline-silicon solar cells based on aluminum-induced crystallization and thermal CVD Prog. Photovolt: Res. Appl. 15 2007 575 586 (Pubitemid 47631305)
3. A.V. Shah, H. Schade, M. Vanecek, J. Meier, E. Vallat-Sauvain, N. Wyrsch, U. Kroll, C. Droz, and J. Bailat Thin-film silicon solar cell technology Prog. Photovolt: Res. Appl. 12 2004 113 142 (Pubitemid 38464403)
4. M.A. Green, K. Emery, Y. Hishikawa, and W. Wart Solar cell efficiency tables (version 37) Prog. Photovolt: Res. Appl. 19 2011 84 92
5. T. Söderström, F.-J. Haug, V. Terrazzoni-Daudrix, and C. Ballif Flexible micromorph tandem a-Si/c-Si solar cells J. Appl. Phys. 107 2010 014507-1 014507-7
6. F. Meillaud, A. Feltrin, M. Despeisse, F.-J. Haug, D. Dominé, M. Python, T. Söderström, P. Cuony, M. Boccard, S. Nicolay, and C. Ballif Realization of high efficiency micromorph tandem silicon solar cells on glass and plastic substrates: issues and potential Sol. Energy Mater. Sol. Cells 95 2011 127 130
7. H.E. Bennett, and J.O. Porteus Relation between surface roughness and specular reflectance at normal incidence J. Opt. Soc. Am. 51 1961 123 129
8. J. Müller, B. Rech, J. Springer, and M. Vanecek TCO and light trapping in silicon thin film solar cells Sol. Energy 77 6 2004 917 930 (Pubitemid 39605899)
9. J. Hüpkes, S.E. Pust, W. Böttler, A. Gordijn, N. Wyrsch, D. Güttler, A.N. Tiwari, I. Gordon, Y. Qiu, Light scattering and trapping in different thin film photovoltaic device, in: 24th European Photovoltaic Solar Energy Conference, 2125 September 2009, Hamburg, Germany, pp. 27662769.
10. K. Jäger, O. Isabella, L. Zhao, and M. Zeman Light scattering properties of surface-textured substrates Phys. Status Solidi C 7 2010 945 948
11. O. Isabella, F. Moll, J. Krc, and M. Zeman Modulated surface textures using zinc-oxide films for solar cells applications Phys. Status Solidi A 207 2010 642 646
12. D. Shir, J. Yoon, D. Chanda, J. Ryu, and J.A. Rogers Performance of ultrathin silicon solar microcells with nanostructures of relief formed by soft imprint lithography for broad band absorption enhancement Nano Lett. 10 2010 3041 3046
13. L. Zeng, Y. Yi, C. Hong, J. Liu, N. Feng, X. Duan, L.C. Kimerling, and B.A. Alamariu Efficiency enhancement in Si solar cells by textured photonic crystal back reflector Appl. Phys. Lett. 89 2006 111111-1 111111-3
14. M. Peters, J.C. Goldschmidt, P. Loper, B. Groß, J. Upping, F. Dimroth, R.B. Wehrspohn, and B. Blasi Spectrally-selective photonic structures for PV applications Energies 3 2010 171 193
15. P.G. OBrien, N.P. Kherani, A. Chutinan, G.A. Ozin, S. John, and S. Zukotynski Silicon photovoltaics using conducting photonic crystal back-reflectors Adv. Mater. 20 2008 1577 1582
16. H.A. Atwater, and A. Polman Plasmonics for improved photovoltaic devices Nat. Mater. 9 2010 205 213
17. Yu.A. Akimov, K. Ostrikov, and E.P. Li Surface plasmon enhancement of optical absorption in thin-film silicon solar cells Plasmonics 4 2009 107 113
18. V.E. Ferry, J.N. Munday, and H.A. Atwater Design considerations for plasmonic photovoltaics Adv. Mater. 22 2010 4794 4808
19. 2:F TCO films deposited by atmospheric pressure CVD Mater. Sci. Eng. B 159160 2009 6 9
20. O. Lupan, S. Shishiyanu, V. Ursaki, H. Khallaf, L. Chow, T. Shishiyanu, V. Sontea, E. Monaico, and S. Railean Synthesis of nanostructured Al-doped zinc oxide films on Si for solar cells applications Sol. Energy Mater. Sol. Cells 93 2009 1417 1422
21. S. Fay, L. Feitknecht, R. Schluchter, U. Kroll, E. Vallat-Sauvain, and A. Shah Rough ZnO layers by LP-CVD process and their effect in improving performances of amorphous and microcrystalline silicon solar cells Sol. Energy Mater. Sol. Cells 90 2006 2960 2967 (Pubitemid 44348926)
22. M. Niggemann, M. Glatthaar, A. Gombert, A. Hinsch, and V. Wittwer Diffraction gratings and buried nano-electrodes - architectures for organic solar cells Thin Solid Films 451452 2004 619 623
23. M.C.R. Heijna, J. Loffler, B.B. Van Aken, W.J. Soppe, R. Van Erven, R. Franken, H. Borg, P.P.G.J.M Peeters, Embossing of light trapping patterns in solgel coatings for thin film silicon solar cells, in: Proceedings of the Nanoscale Photonic and Cell Technologies for Photovoltaics, San Diego, CA, USA, vol. 7047, 2008, pp. 704706704709.
24. M.-S. Kim, J.-S. Kim, J.C. Cho, M. Shtein, J. Kim, L.J. Guo, and J. Kim Flexible conjugated polymer photovoltaic cells with controlled heterojunctions fabricated using nanoimprint lithography Appl. Phys. Lett. 90 2007 123113-1 123113-3
25. M. Aryal, F. Buyukserin, K. Mielczarek, X.-M. Zhao, J. Gao, A. Zakhidov, and W. Hu Imprinted large-scale high density polymer nanopillars for organic solar cells J. Vac. Sci. Technol. B 26 2008 2562 2566
26. D.N. Weiss, H.-C. Yuan, B.G. Lee, H.M. Branz, S.T. Meyers, A. Grenville, and D.A. Keszler Nanoimprinting for diffractive light trapping in solar cells J. Vac. Sci. Technol. B 28 2010 C6M98C6M103
27. C. Battaglia, K. Söderström, J. Escarré, F.-J. Haug, D. Dominé, P. Cuony, M. Boccard, G. Bugnon, C. Denizot, M. Despeisse, A. Feltrin, and C. Ballif Efficient light management scheme for thin film silicon solar cells via transparent random nanostructures fabricated by nanoimprinting Appl. Phys. Lett. 96 2010 213504-1 213504-3
28. K. Söderström, J. Escarré, O. Cubero, F.-J. Haug, S. Perregaux, and C. Ballif UV-nano-imprint lithography technique for the replication of back reflectors for nip thin film silicon solar cells Prog. Photovolt: Res. Appl. 19 2011 202 210
29. M. Python, E. Vallat-Sauvain, J. Bailat, D. Dominé, L. Fesquet, A. Shah, and C. Ballif Relation between substrate surface morphology and microcrystalline silicon solar cell performance J. Non-Cryst. Solids 354 2008 2258 2262
30. N. Taneda, T. Oyama, K. Sato, Light scattering effects of highly textured transparent conductive oxides films, Technical Digest of PVSEC-17, Fukuoka, Japan, 2007, pp. 309312.
31. F.-J. Haug, T. Söderström, D. Dominé, C. Ballif, Light trapping effects in thin film silicon solar cells, MRS Spring Meeting, San Francisco, USA, 2009.
32. J. Krč, B. Lipovsek, M. Bokalic, A. Campa, T. Oyama, M. Kambe, T. Matsui, H. Sai, M. Kondo, and M. Topic Potential of thin-film silicon solar cells using high haze TCO superstrates Thin Solid Films 518 2010 3054 3058
33. A. Bessonov, J.-G. Kim, J.-W. Seo, J.-W. Lee, and S. Lee Design of patterned surfaces with selective wetting using nanoimprint lithography Macromol. Chem. Phys. 211 2010 2636 2641
34. H.D. Rowland, A.C. Sun, P.R. Schunk, and W.P. King Impact of polymer film thickness and cavity size on polymer flow during embossing: toward process design rules for nanoimprint lithography J. Micromech. Microeng. 15 2005 2414 2425 (Pubitemid 41677110)
35. J. Escarré, K. Söderström, C. Battaglia, F.-J. Haug, and C. Ballif High fidelity transfer of nanometric random textures by UV embossing for thin film solar cells applications Sol. Energy Mater. Sol. Cells 95 2011 881 886
36. V. Terrazzoni-Daudrix, J. Guillet, F. Freitas, A. Shah, C. Ballif, P. Winkler, M. Ferreloc, S. Benagli1, X. Niquille, D. Fischer, and R. Morf Characterisation of rough reflecting substrates incorporated into thinfilm silicon solar cells Prog. Photovolt: Res. Appl. 14 2006 485 498 (Pubitemid 44376284)
37. J. Krč, M. Zeman, F. Smole, and M. Topic Optical modeling of a-Si:H solar cells deposited on textured glass/SnO substrates J. Appl. Phys. 92 2002 749 755
38. J. Krč, F. Smole, and M. Topic Analysis of light scattering in amorphous Si:H solar cells by a one-dimensional semi-coherent optical model Prog. Photovolt: Res. Appl. 11 2003 15 26
39. C. Rockstuhl, S. Fahr, K. Bittkau, T. Beckers, R. Carius, F.-J. Haug, T. Söderström, C. Ballif, and F. Lederer Comparison and optimization of randomly textured surfaces in thin-film solar cells Opt. Express 18 2010 A335 A342
40. C. Rockstuhl, S. Fahr, F. Lederer, F.-J. Haug, T. Söderström, S. Nicolay, M. Despeisse, and C. Ballif Light absorption in textured thin film silicon solar cells: A simple scalar scattering approach versus rigorous simulation Appl. Phys. Lett. 98 2011 051102-1 051102-3
41. C. Battaglia, J. Escarré, K. Söderström, F.-J. Haug, D. Dominé, A. Feltrin, and C. Ballif A new approach to light scattering from nanotextured interfaces for thin-film silicon solar cells Mater. Res. Soc. Symp. Proc. 1245 2010 A03 A04
42. K. Bittkau, T. Becker, S. Fahr, C. Rockstuhl, F. Lederer, and R. Carius Nanoscale investigation of light-trapping in a-Si: H solar cell structures with randomly textured interfaces Phys. Status Solidi A 205 2008 2766 2776
43. M. Kroll, S. Fahr, C. Helgert, C. Rockstuhl, F. Lederer, and T. Pertsch Employing dielectric diffractive structures in solar cells - a numerical study Phys. Status Solidi A 205 2008 2777 2795
44. C.F. Bohren, and D.R. Huffman Absorption and Scattering of Light by Small Particles 1998 Wiley New York 530 pp
45. J. Ferber, and J. Luther Computer simulations of light scattering and absorption in dye-sensitized solar cells Sol. Energy Mater. Sol. Cells 54 1998 265 275 (Pubitemid 128408978)
46. S. Hore, C. Vetter, R. Kern, H. Smit, and A. Hinsch Influence of scattering layers on efficiency of dye-sensitized solar cells Sol. Energy Mater. Sol. Cells 90 2006 1176 1188
47. M. Python, D. Dominé, T. Söderström, F. Meillaud, and C. Ballif Microcrystalline silicon solar cells: effect of substrate temperature on cracks and their role in postoxidation Prog. Photovolt: Res. Appl. 18 2010 491 499