-
1
-
-
69749086855
-
Advanced thin film technology for ultrahigh resolution X-ray microscopy
-
Vila-Comamala, J., Jefimovs, K., Raabe, J., Pilvi, T., Fink, R. H., Senoner, M., Maassdorf, A., Ritala, M., and David, C., "Advanced thin film technology for ultrahigh resolution X-ray microscopy," Ultramicroscopy 109(11), 1360-1364 (2009).
-
(2009)
Ultramicroscopy
, vol.109
, Issue.11
, pp. 1360-1364
-
-
Vila-Comamala, J.1
Jefimovs, K.2
Raabe, J.3
Pilvi, T.4
Fink, R.H.5
Senoner, M.6
Maassdorf, A.7
Ritala, M.8
David, C.9
-
2
-
-
70349665354
-
Demonstration of 12 nm resolution fresnel zone plate lens based soft X-ray microscopy
-
Chao, W., Kim, J., Rekawa, S., Fischer, P., and Anderson, E. H., "Demonstration of 12 nm Resolution Fresnel Zone Plate Lens based Soft X-ray Microscopy," Opt. Express 17(20), 17669-17677 (2009).
-
(2009)
Opt. Express
, vol.17
, Issue.20
, pp. 17669-17677
-
-
Chao, W.1
Kim, J.2
Rekawa, S.3
Fischer, P.4
Anderson, E.H.5
-
3
-
-
72849123318
-
Colddeveloped electron-beam-patterned ZEP 7000 for fabrication of 13 nm nickel zone plates
-
Reinspach, J., Lindblom, M., von Hofsten, O., Bertilson, M., Hertz, H. M. and Holmberg, A., "Colddeveloped electron-beam-patterned ZEP 7000 for fabrication of 13 nm nickel zone plates," J. Vac. Sci. Technol. B 27(6), 2593-2596 (2009)
-
(2009)
J. Vac. Sci. Technol. B
, vol.27
, Issue.6
, pp. 2593-2596
-
-
Reinspach, J.1
Lindblom, M.2
Von Hofsten, O.3
Bertilson, M.4
Hertz, H.M.5
Holmberg, A.6
-
4
-
-
77957924973
-
Simulation of heat transfer in zone plate optics irradiated by X-ray free electron laser radiation
-
Nilsson, D., Holmberg, A., Sinn, H., and Vogt, U., "Simulation of heat transfer in zone plate optics irradiated by X-ray free electron laser radiation," Nucl. Instrum. Meth. A 621(1-3), 620-626 (2010).
-
(2010)
Nucl. Instrum. Meth. A
, vol.621
, Issue.1-3
, pp. 620-626
-
-
Nilsson, D.1
Holmberg, A.2
Sinn, H.3
Vogt, U.4
-
5
-
-
51149220754
-
Thermal-boundary resistance
-
Swartz, E. T. and Pohl, R. O., "Thermal-Boundary Resistance," Rev. Mod. Phys. 61(3), 605-668 (1989).
-
(1989)
Rev. Mod. Phys.
, vol.61
, Issue.3
, pp. 605-668
-
-
Swartz, E.T.1
Pohl, R.O.2
-
6
-
-
0000946149
-
Kapitza conductance and heat-flow between solids at temperatures from 50 to 300 K
-
Stoner, R. J. and Maris, H. J., "Kapitza Conductance and Heat-Flow Between Solids at Temperatures from 50 to 300 K," Phys. Rev. B 48(22), 16373-16387 (1993).
-
(1993)
Phys. Rev. B
, vol.48
, Issue.22
, pp. 16373-16387
-
-
Stoner, R.J.1
Maris, H.J.2
-
7
-
-
79960508164
-
-
http://www.diamond-materials.com/downloads/cvd-diamond-booklet.pdf
-
-
-
-
8
-
-
0001120565
-
Performance of diamond as X-ray monochromator under very high heat flux in a synchrotron beam
-
Als-Nielsen, J., Freund, A. K., Wulff, M., Hanfland, M., and Häusermann, D., "Performance of diamond as X-ray monochromator under very high heat flux in a synchrotron beam," Nucl. Instrum. Meth. B 94(3), 348-350 (1994).
-
(1994)
Nucl. Instrum. Meth. B
, vol.94
, Issue.3
, pp. 348-350
-
-
Als-Nielsen, J.1
Freund, A.K.2
Wulff, M.3
Hanfland, M.4
Häusermann, D.5
-
9
-
-
0035270014
-
Effect of high temperature annealing on optical and thermal properties of CVD diamond
-
DOI 10.1016/S0925-9635(00)00517-3, PII S0925963500005173
-
Khomich, A. V., Ralchenko, V. G., Vlasov, A. V., Khmelnitskiy, R. A., Vlasov, I. I., and Konov, V. I., "Effect of high temperature annealing on optical and thermal properties of CVD diamond," Diamond and Related Materials 10(3-7), 546-551 (2001). (Pubitemid 32477571)
-
(2001)
Diamond and Related Materials
, vol.10
, Issue.3-7
, pp. 546-551
-
-
Khomich, A.V.1
Ralchenko, V.G.2
Vlasov, A.V.3
Khmelnitskiy, R.A.4
Vlasov, I.I.5
Konov, V.I.6
-
10
-
-
0037787536
-
Phase transformation of sputter deposited tungsten thin films with A-15 structure
-
O'Keefe, M. J. and Grant, J. T., "Phase transformation of sputter deposited tungsten thin films with A-15 structure," J. Appl. Phys. 79(12), 9134-9141 (1996). (Pubitemid 126581282)
-
(1996)
Journal of Applied Physics
, vol.79
, Issue.12
, pp. 9134-9141
-
-
O'Keefe, M.J.1
Grant, J.T.2
-
11
-
-
0031474984
-
Development of X-ray mask fabrication process using W-sputtering
-
Lee, T., LeE, S., and Ahn, J., "Development of x-ray mask fabrication process using w-sputtering," Metals and Materials International 3(4), 272-276 (1997). (Pubitemid 127339292)
-
(1997)
Metals and Materials International
, vol.3
, Issue.4
, pp. 272-276
-
-
Lee, T.1
Lee, S.2
Ahn, J.3
-
13
-
-
77958526093
-
Beam-induced damage on diffractive hard X-ray optics
-
Nygard, K., Gorelick, S., Vila-Comamala, J., Farm, E., Bergamaschi, A., Cervellino, A., Gozzo, F., Patterson, B. D., Ritala, M., and David, C., "Beam-induced damage on diffractive hard X-ray optics," Journal of Synchrotron Radiation 17(6), 786-790 (2010).
-
(2010)
Journal of Synchrotron Radiation
, vol.17
, Issue.6
, pp. 786-790
-
-
Nygard, K.1
Gorelick, S.2
Vila-Comamala, J.3
Farm, E.4
Bergamaschi, A.5
Cervellino, A.6
Gozzo, F.7
Patterson, B.D.8
Ritala, M.9
David, C.10
-
14
-
-
0025414171
-
Low stress tungsten absorber for X-ray masks
-
DOI 10.1016/0167-9317(90)90119-E
-
Ku, Y. C., Smith, H. I., and Plotnik, I., "Low Stress Tungsten Absorber for X-ray Masks," Microelectron. Eng. 11(1-4), 303-308 (1990). (Pubitemid 20687693)
-
(1990)
Microelectronic Engineering
, vol.11
, Issue.1-4
, pp. 303-308
-
-
Ku, Y.C.1
Smith Henry, I.2
Plotnik, I.3
-
15
-
-
0029407134
-
High synchrotron radiation durability microwave plasma chemical vapor deposition diamond x-ray mask membrane
-
Tsuboi, S., Okuyama, H., Ashikaga, K., and Yamashita, Y., "High synchrotron radiation durability microwave plasma chemical vapor deposition diamond x-ray mask membrane," J. Vac. Sci. Technol. B 13(6), 3099-3102 (1995).
-
(1995)
J. Vac. Sci. Technol. B
, vol.13
, Issue.6
, pp. 3099-3102
-
-
Tsuboi, S.1
Okuyama, H.2
Ashikaga, K.3
Yamashita, Y.4
|