A one-step photolithography method for fabrication of a staggered herringbone mixer using inclined UV lithography

Journal of Micromechanics and Microengineering

Volumn 21, Issue 7, 2011, Pages

  Baek, Sunghoon ^a   Song, Simon ^a  

^a Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

3D STRUCTURE; FABRICATION METHOD; FABRICATION TECHNIQUE; FACILE METHOD; INCLINED UV LITHOGRAPHY; MICROFLUIDIC CHIP; PHOTOLITHOGRAPHY PROCESS; SINGLE-STEP; STAGGERED HERRINGBONE MIXER;

MIXERS (MACHINERY); PHOTOLITHOGRAPHY;

FABRICATION;

EID: 79960048119     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/7/077001     Document Type: Article

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