3-d patterned microstructures using inclined uv exposure and metal transfer micromolding

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2006, Pages 348-351

  Choi, Seong O ^a   Rajaraman, Swaminathan ^a   Yoon, Yong Kyu ^a   Wu, Xiaosong ^b   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b Georgia Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; AUTOMOBILE MANUFACTURE; FLUORESCENCE IMAGING; LITHOGRAPHY; MAMMALS; MICROMACHINING; MICROSTRUCTURE; MICROSYSTEMS; MOLDING; NEEDLES; POLYDIMETHYLSILOXANE; SILICONES; SOLID-STATE SENSORS;

FLUORESCENT IMAGING; INCLINED UV LITHOGRAPHY; METAL TRANSFER MICROMOLDING; MICRO-MOLDING PROCESS; MICRONEEDLE ARRAYS; PATTERNED MICROSTRUCTURES; POLYDIMETHYLSILOXANE PDMS; THREEDIMENSIONAL (3-D);

METALS;

EID: 84960277517     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

1. G. Vozzia, C. Flaimb, A. Ahluwaliaa, and S. Bhatiab, “Fabrication of PLGA scaffolds using soft lithography and microsyringe deposition”, Biomaterials, 24 (2003), pp. 2533-2540
2. Y.-K. Yoon, J.-H. Park, and M. G. Allen, “Muldirectional UV Lithography for Complex 3-D MEMS Structures”, J. MEMS (2006), in press
3. N. P. Pham, E. Boellaard, J. N. Burghartz, and P. M. Sarro, “Photoresist Coating Methods for the Integration of Novel 3-D RF Microstructures”, J. MEMS, 13 (2004), pp. 491-499.
4. S. Linder, H. Baltes, F. Gneadinger and E. Doering, “Photolithograhy in Anisotropically Etched Grooves”, Proceedings of the IEEE MEMS Conference (MEMS’96), San Diego, CA, 2/11-15/96, IEEE (1996), pp. 38-43.
5. th International Conference on Solid-state Sensors, Actuators and Microsystems (Transducers’05), Seoul, Korea, 6/6-9/05, IEEE (2005), pp. 1469-1472.
6. S. Hur, D. Khang, C. Kocabas, and J. A. Rogers, “Nanotransfer Printing by use of Noncovalent Surface Forces: Applications to Thin-film Transistors that use Single-Walled Carbon Nanotube Networks and Semiconducting Polymers”, Appl. Phys. Lett., 85 (2004), pp. 5730-5732
7. X. Wu, Y. Zhao, Y. K. Yoon, S. O. Choi, J. H. Park, and M. G. Allen, “Wafer-scale Micromolding of Unitary Polymeric Microstructures with Simultaneously Formed Functional Metal Surface”, Proceedings of µTAS 2005 conference, Boston, MA, 10/09-13/2005, Transducers Research Foundation (2005), pp.205-207
8. M. Han, W. Lee, S.-K. Lee, and S. S. Lee, “3-D Microfabrication using Inclined/Rotated UV Lithography”, Sensors and Actuators A, 111 (2004), pp. 14-20.
9. H. Sato, T. Kakinuma, J. S. Go, and S. Shoji, “In-channel 3-D Micromesh Structures using Maskless Multi-Angle Exposures and their Microfilter Application”, Sensors and Actuators A, 111 (2004), pp. 87-92.
10. Y.-K. Yoon, J.-H. Park, F. Cros, and M. G. Allen, “Integrated Vertical Screen Microfilter System using Inclined SU-8 Structures”, Proceedings of the IEEE MEMS Conference (MEMS’03), Kyoto, Japan, 1/19-23/2003, IEEE (2003), pp. 227-230.
11. M.O. Heuschkel, M. Fejtl, M. Raggenbass, D. Bertrand, P. Renaud, “A Three Dimensional Multi-Electrode Array for Multi-Site Stimulation and Recording in Acute Brain Slices”, J. Neuroscience Methods, 114 (2002), pp. 135-148.