Cobalt oxide nanosheet humidity sensor integrated with circuit on chip

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 1742-1744

  Yang, Ming Zhi ^a   Dai, Ching Liang ^a   Shih, Po Jen ^b   Chen, Yen Chi ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b NATIONAL UNIVERSITY OF KAOHSIUNG   (Taiwan)

Author keywords

Cobalt oxide film; Humidity sensor; Microsensors; Ring oscillator circuit

Indexed keywords

CAPACITIVE TYPE; COBALT OXIDE FILMS; COBALT OXIDES; COMPLEMENTARY METAL OXIDE SEMICONDUCTOR PROCESS; INTER-DIGITATED ELECTRODES; ON CHIPS; OSCILLATION FREQUENCY; POST PROCESS; RING OSCILLATOR; RING OSCILLATOR CIRCUITS; SACRIFICIAL OXIDE; SENSING FILMS; WORK STUDY;

CAPACITANCE; COBALT; ELECTRIC NETWORK ANALYSIS; ELECTRODES; HUMIDITY SENSORS; METALLIC COMPOUNDS; MOS DEVICES; NANOSHEETS; OXIDE FILMS; WATER VAPOR;

OSCILLATORS (ELECTRONIC);

EID: 79960042526     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2010.12.105     Document Type: Conference Paper

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