Cobalt oxide nanosheet and CNT micro carbon monoxide sensor integrated with readout circuit on chip

Sensors

Volumn 10, Issue 3, 2010, Pages 1753-1764

  Dai, Ching Liang ^a   Chen, Yen Chi ^a   Wu, Chyan Chyi ^b   Kuo, Chin Fu ^c  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

^b TAMKANG UNIVERSITY   (Taiwan)

^c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Cobalt oxide film; Micro carbon monoxide sensor; Readout circuit

Indexed keywords

CARBON MONOXIDE SENSOR; COBALT OXIDE FILMS; COMPLEMENTARY METAL OXIDE SEMICONDUCTOR PROCESS; POLYSILICON RESISTORS; READ-OUT CIRCUIT; ROOM-TEMPERATURE OPERATION; SACRIFICIAL LAYER; SENSOR RESISTANCE;

CARBON MONOXIDE; COBALT; CONDUCTIVE PLASTICS; NANOCOMPOSITE FILMS; NANOSHEETS; OXIDE FILMS; READOUT SYSTEMS;

SENSORS;

CARBON MONOXIDE; CARBON NANOTUBE; COBALT; COBALT OXIDE; NANOMATERIAL; OXIDE;

ARTICLE; CHEMISTRY; EQUIPMENT DESIGN; INSTRUMENTATION; METHODOLOGY; MICROCHIP ANALYSIS; SEMICONDUCTOR;

CARBON MONOXIDE; COBALT; EQUIPMENT DESIGN; MICROCHIP ANALYTICAL PROCEDURES; NANOSTRUCTURES; NANOTUBES, CARBON; OXIDES; SEMICONDUCTORS;

EID: 77955475304     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s100301753     Document Type: Article

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