Humidity sensor structures with thin film porous alumina for on-chip integration

Thin Solid Films

Volumn 517, Issue 22, 2009, Pages 6198-6201

  Juhasz L ^a   Mizsei, J ^a  

^a BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

Author keywords

AAO; Humidity sensor; Integrated sensor; Porous alumina

Indexed keywords

AAO; ALUMINUM THIN FILMS; ANODIC ALUMINUM OXIDE; ANODIC BIAS; CAPACITIVE HUMIDITY SENSORS; CAPACITIVE SENSOR; CMOS-MEMS; ELECTROPLATED GOLD; INTEGRATED SENSOR; LOW POWER; ON-CHIP INTEGRATION; POROUS ALUMINA; RELATIVE HUMIDITIES; SEMICONDUCTOR PROCESSING; SENSING LAYERS; SENSOR STRUCTURES; SILICON SUBSTRATES; STATE OF THE ART; ULTRA-THIN;

ALUMINA; ALUMINUM; ANODIC OXIDATION; ARTS COMPUTING; ATMOSPHERIC HUMIDITY; ELECTROCHEMICAL OXIDATION; HUMIDITY SENSORS; MOISTURE; PALLADIUM; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; THIN FILM DEVICES; THIN FILMS;

WIRELESS SENSOR NETWORKS;

EID: 67650389170     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.04.010     Document Type: Article

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