메뉴 건너뛰기




Volumn 467, Issue 2131, 2011, Pages 2043-2053

Electron and hole trapping in polycrystalline metal oxide materials

Author keywords

Density functional theory; Electron trapping; Hole trapping; Metal oxide; Polycrystallinity

Indexed keywords

ELECTRON TRAPPING; HOLE TRAPPING; METAL-OXIDE; POLYCRYSTALLINE METALS; POLYCRYSTALLINITY; TECHNOLOGICAL APPLICATIONS; WIDE-GAP INSULATORS;

EID: 79959918176     PISSN: 13645021     EISSN: 14712946     Source Type: Journal    
DOI: 10.1098/rspa.2010.0518     Document Type: Conference Paper
Times cited : (38)

References (49)
  • 1
    • 48649106119 scopus 로고    scopus 로고
    • Origin of the asymmetry in the magnitude of the statistical variability of n-and p-channel poly Si gate bulk MOSFETs
    • doi:10.1109/LED.2008.2000843
    • Asenov, A., Cathignol, A., Cheng, B., McKenna, K. P., Brown, A. R., Shluger, A. L. & Ghibaudo, G. 2008 Origin of the asymmetry in the magnitude of the statistical variability of n-and p-channel poly Si gate bulk MOSFETs. IEEE Electron. Dev. Lett. 29, 913. (doi:10.1109/LED.2008.2000843)
    • (2008) IEEE Electron. Dev. Lett. , vol.29 , pp. 913
    • Asenov, A.1    Cathignol, A.2    Cheng, B.3    McKenna, K.P.4    Brown, A.R.5    Shluger, A.L.6    Ghibaudo, G.7
  • 2
    • 77956320644 scopus 로고    scopus 로고
    • Electron trapping in misfit dislocations of MgO thin films
    • doi:10.1103/PhysRevB. 81.241415
    • Benia, H.-M., Myrach, P., Gonchar, A., Risse, T., Nilius, N. & Freund, H.-J. 2010 Electron trapping in misfit dislocations of MgO thin films. Phys. Rev. B 81, 241415R. (doi:10.1103/PhysRevB. 81.241415)
    • (2010) Phys. Rev. B , vol.81
    • Benia, H.-M.1    Myrach, P.2    Gonchar, A.3    Risse, T.4    Nilius, N.5    Freund, H.-J.6
  • 3
    • 77950852717 scopus 로고    scopus 로고
    • Memristive switches enable stateful logic operations via material implication
    • doi:10.1038/nature08940
    • Borghetti, J., Snider, G., Kuekes, P. J., Joshua Yang, J., Stewart, D. R. & Stanley Williams, R. 2010 Memristive switches enable stateful logic operations via material implication. Nature 464, 873. (doi:10.1038/nature08940)
    • (2010) Nature , vol.464 , pp. 873
    • Borghetti, J.1    Snider, G.2    Kuekes, P.J.3    Joshua Yang, J.4    Stewart, D.R.5    Stanley Williams, R.6
  • 4
    • 77949524802 scopus 로고    scopus 로고
    • Astroelectrochemistry: The role of redox reactions in cosmic dust chemistry
    • doi:10.1039/b917817a
    • Caruana, D. J. & Holt, K. B. 2010 Astroelectrochemistry: the role of redox reactions in cosmic dust chemistry. Phys. Chem. Chem. Phys. 12, 3072-3079. (doi:10.1039/b917817a)
    • (2010) Phys. Chem. Chem. Phys. , vol.12 , pp. 3072-3079
    • Caruana, D.J.1    Holt, K.B.2
  • 5
    • 0015098668 scopus 로고
    • Coincidence twist boundaries between crystalline smoke particles
    • doi:10.1063/1.1660685
    • Chaudhari, P. & Matthews, J. W. 1971 Coincidence twist boundaries between crystalline smoke particles. J. Appl. Phys. 42, 3063. (doi:10.1063/1.1660685)
    • (1971) J. Appl. Phys. , vol.42 , pp. 3063
    • Chaudhari, P.1    Matthews, J.W.2
  • 7
    • 77951531987 scopus 로고    scopus 로고
    • A genetic algorithm for predicting the structures of interfaces in multicomponent systems
    • doi:10.1038/nmat2712
    • Chua, A. L.-S., Benedek, N. A., Chen, L., Finnis, M. W. & Sutton, A. P. 2010 A genetic algorithm for predicting the structures of interfaces in multicomponent systems. Nat. Mater. 9, 418. (doi:10.1038/nmat2712)
    • (2010) Nat. Mater , vol.9 , pp. 418
    • Chua, A.L.-S.1    Benedek, N.A.2    Chen, L.3    Finnis, M.W.4    Sutton, A.P.5
  • 8
    • 0023564689 scopus 로고
    • Grain boundaries in polycrystalline ceramics
    • doi:10.1146/annurev. ms.17.080187.000421
    • Clarke, D. R. 1987 Grain boundaries in polycrystalline ceramics. Annu. Rev. Mater. Sci. 17, 57. (doi:10.1146/annurev. ms.17.080187.000421)
    • (1987) Annu. Rev. Mater. Sci. , vol.17 , pp. 57
    • Clarke, D.R.1
  • 9
    • 0032648286 scopus 로고    scopus 로고
    • Varistor ceramics
    • doi:10.1111/j.1151-2916. 1999.tb01793.x
    • Clarke, D. R. 1999 Varistor ceramics. J. Am. Ceram. Soc. 82, 485. (doi:10.1111/j.1151-2916. 1999.tb01793.x)
    • (1999) J. Am. Ceram. Soc. , vol.82 , pp. 485
    • Clarke, D.R.1
  • 10
    • 0001549573 scopus 로고
    • Surface excitons on ionic crystals
    • doi:10.1016/0039-6028 86 90232-3
    • Cox, P. A. & Williams, A. A. 1986 Surface excitons on ionic crystals. Surf. Sci. Lett. 175, L782-L786. (doi:10.1016/0039-6028 (86) 90232-3)
    • (1986) Surf. Sci. Lett. , vol.175
    • Cox, P.A.1    Williams, A.A.2
  • 11
    • 0001758902 scopus 로고    scopus 로고
    • First-principles study of a tilt grain boundary in rutile
    • doi:10.1103/PhysRevB.54.13727
    • Dawson, I., Bristowe, P. D., Lee, M.-H., Payne, M. C., Segall, M. D. & White, J. A. 1996 First-principles study of a tilt grain boundary in rutile. Phys. Rev. B 54, 13727-13733. (doi:10.1103/PhysRevB.54.13727)
    • (1996) Phys. Rev. B , vol.54 , pp. 13727-13733
    • Dawson, I.1    Bristowe, P.D.2    Lee, M.-H.3    Payne, M.C.4    Segall, M.D.5    White, J.A.6
  • 12
    • 84870547817 scopus 로고
    • Grain boundaries in ionic crystals
    • doi:10.1088/0022-3719/19/23/005
    • Duffy, D. M. 1986 Grain boundaries in ionic crystals. J. Phys. C: Solid State Phys. 19, 4393. (doi:10.1088/0022-3719/19/23/005)
    • (1986) J. Phys. C: Solid State Phys. , vol.19 , pp. 4393
    • Duffy, D.M.1
  • 14
    • 0029309726 scopus 로고
    • 2 sensors: Current status and future prospects
    • doi:10.1016/0925-4005 94 01546-T
    • 2 sensors: current status and future prospects. Sensors and Actuators B: Chemical 26, 1-12. (doi:10.1016/0925-4005 (94) 01546-T)
    • (1995) Sensors and Actuators B: Chemical , vol.26 , pp. 1-12
    • Göpel, W.1    Schierbaum, K.D.2
  • 15
    • 60949087200 scopus 로고    scopus 로고
    • Excitons in potassium bromide: A study using embedded time-dependent density functional theory and equation-ofmotion coupled cluster methods
    • doi:10.1016/j.cplett.2009.01.073
    • Govind, N., Sushko, P. V., Hess, W. P., Valiev, M. & Kowalski, K. 2009 Excitons in potassium bromide: a study using embedded time-dependent density functional theory and equation-ofmotion coupled cluster methods. Chem. Phys. Lett. 470, 353. (doi:10.1016/j.cplett.2009.01.073)
    • (2009) Chem. Phys. Lett. , vol.470 , pp. 353
    • Govind, N.1    Sushko, P.V.2    Hess, W.P.3    Valiev, M.4    Kowalski, K.5
  • 16
    • 0025384191 scopus 로고
    • Electrical properties of grain boundaries in polycrystalline compound semiconductors
    • doi:10.1088/0268-1242/5/2/001
    • Greutert, F. & Blatter, G. 1990 Electrical properties of grain boundaries in polycrystalline compound semiconductors. Semicond. Sci. Technol. 5, 111. (doi:10.1088/0268-1242/5/2/001)
    • (1990) Semicond. Sci. Technol , vol.5 , pp. 111
    • Greutert, F.1    Blatter, G.2
  • 17
    • 0000321345 scopus 로고    scopus 로고
    • Computer simulation of general grain boundaries in rocksalt oxides
    • doi:10.1103/PhysRevB.60.2740
    • Harding, J. H., Harris, D. J. & Parker, S. C. 1999 Computer simulation of general grain boundaries in rocksalt oxides. Phys. Rev. B 60, 2740. (doi:10.1103/PhysRevB.60.2740)
    • (1999) Phys. Rev. B , vol.60 , pp. 2740
    • Harding, J.H.1    Harris, D.J.2    Parker, S.C.3
  • 18
    • 0001356979 scopus 로고    scopus 로고
    • Grain boundaries in high-Tc superconductors
    • doi:10.1103/RevModPhys.74.485
    • Hilgenkamp, H. & Mannhart, J. 2002 Grain boundaries in high-Tc superconductors. Rev. Mod. Phys. 74, 485-549. (doi:10.1103/RevModPhys.74.485)
    • (2002) Rev. Mod. Phys. , vol.74 , pp. 485-549
    • Hilgenkamp, H.1    Mannhart, J.2
  • 19
    • 0039506235 scopus 로고    scopus 로고
    • Atomic process of electron-irradiation-induced grain-boundary migration in a MgO tilt boundary
    • doi:10.1080/01418619808223761
    • Kizuka, T., Iijima, M. & Tanaka, N. 1998 Atomic process of electron-irradiation-induced grain-boundary migration in a MgO tilt boundary. Phil. Mag. A 77, 413. (doi:10.1080/01418619808223761)
    • (1998) Phil. Mag. A , vol.77 , pp. 413
    • Kizuka, T.1    Iijima, M.2    Tanaka, N.3
  • 20
    • 0036564821 scopus 로고    scopus 로고
    • Computational studies of grain boundaries in covalent materials
    • DOI 10.1088/0965-0393/10/3/202, PII S0965039302215569
    • Kohyama, M. 2002 Computational studies of grain boundaries in covalent materials. Model. Simul. Mater. Sci. Eng. 10, R31. (doi:10.1088/0965-0393/10/3/ 202) (Pubitemid 34682699)
    • (2002) Modelling and Simulation in Materials Science and Engineering , vol.10 , Issue.3
    • Kohyama, M.1
  • 21
    • 0030190741 scopus 로고    scopus 로고
    • Efficiency of ab-initio total energy calculations for metals and semiconductors using a plane-wave basis set
    • DOI 10.1016/0927-0256(96)00008-0, PII S0927025696000080
    • Kresse, G. & Furthmüller, J. 1996a Efficiency of ab-initio total energy calculations for metals and semiconductors using a plane-wave basis set. J. Comput. Mater. 6, 15-50. (doi:10.1016/0927-0256 (96) 00008-0) (Pubitemid 126412269)
    • (1996) Computational Materials Science , vol.6 , Issue.1 , pp. 15-50
    • Kresse, G.1    Furthmuller, J.2
  • 22
    • 2442537377 scopus 로고    scopus 로고
    • Efficient iterative schemes for ab initio total-energy calculations using a plane-wave basis set
    • doi:10.1103/PhysRevB.54.11169
    • Kresse, G. & Furthmüller, J. 1996b Efficient iterative schemes for ab initio total-energy calculations using a plane-wave basis set. Phys. Rev. B 54, 11169-11186. (doi:10.1103/PhysRevB.54.11169)
    • (1996) Phys. Rev. B , vol.54 , pp. 11169-11186
    • Kresse, G.1    Furthmüller, J.2
  • 23
    • 33750800144 scopus 로고
    • Potential models for ionic oxides
    • doi:10.1088/0022-3719/18/6/010
    • Lewis, G. V. & Catlow, C. R. A. 1985 Potential models for ionic oxides. J. Phys. C: Solid State Phys. 18, 1149. (doi:10.1088/0022-3719/18/6/010)
    • (1985) J. Phys. C: Solid State Phys. , vol.18 , pp. 1149
    • Lewis, G.V.1    Catlow, C.R.A.2
  • 24
    • 0016114366 scopus 로고
    • The application of semiconductors with negative electron affinity surfaces to electron emission devices
    • doi:10.1109/PROC.1974.9626
    • Martinelli, R. U. & Fisher, D. G. 1974 The application of semiconductors with negative electron affinity surfaces to electron emission devices. Proc. IEEE 62, 1339. (doi:10.1109/PROC.1974.9626)
    • (1974) Proc. IEEE , vol.62 , pp. 1339
    • Martinelli, R.U.1    Fisher, D.G.2
  • 25
    • 54949088944 scopus 로고    scopus 로고
    • Electron-trapping polycrystalline materials with negative electron affinity
    • doi:10.1038/nmat2289
    • McKenna, K. P. & Shluger, A. L. 2008 Electron-trapping polycrystalline materials with negative electron affinity. Nat. Mater. 7, 859-862. (doi:10.1038/nmat2289)
    • (2008) Nat. Mater , vol.7 , pp. 859-862
    • McKenna, K.P.1    Shluger, A.L.2
  • 26
    • 67349259657 scopus 로고    scopus 로고
    • Electronic properties of defects in polycrystalline dielectric materials
    • doi:10.1016/j.mee.2009.03.125
    • McKenna, K. P. & Shluger, A. L. 2009a Electronic properties of defects in polycrystalline dielectric materials. Microelectron. Eng. 86, 1751-1755. (doi:10.1016/j.mee.2009.03.125)
    • (2009) Microelectron. Eng , vol.86 , pp. 1751-1755
    • McKenna, K.P.1    Shluger, A.L.2
  • 27
    • 68949127611 scopus 로고    scopus 로고
    • First-principles calculations of defects near a grain boundary in MgO
    • doi:10.1103/PhysRevB.79.224116
    • McKenna, K. P. & Shluger, A. L. 2009b First-principles calculations of defects near a grain boundary in MgO. Phys. Rev. B. 79, 224116. (doi:10.1103/PhysRevB.79.224116)
    • (2009) Phys. Rev. B , vol.79 , pp. 224116
    • McKenna, K.P.1    Shluger, A.L.2
  • 30
    • 10044225881 scopus 로고    scopus 로고
    • Giant tunnelling magnetoresistance at room temperature with MgO (100) tunnel barriers
    • doi:10.1038/nmat1256
    • Parkin, S. S. P., Kaiser, C., Panchula, A., Rice, P. M., Hughes, B., Samant, M. & Yang, S.-H. 2004 Giant tunnelling magnetoresistance at room temperature with MgO (100) tunnel barriers. Nat. Mater. 3, 862. (doi:10.1038/nmat1256)
    • (2004) Nat. Mater , vol.3 , pp. 862
    • Parkin, S.S.P.1    Kaiser, C.2    Panchula, A.3    Rice, P.M.4    Hughes, B.5    Samant, M.6    Yang, S.-H.7
  • 32
    • 0942299562 scopus 로고    scopus 로고
    • Image states and excitons at insulator surfaces with negative electron affinity
    • doi:10.1103/PhysRevLett.91.256802
    • Rohlfing, M., Wang, N.-P., Krüger, P. & Pollmann, J. 2003 Image states and excitons at insulator surfaces with negative electron affinity. Phys. Rev. Lett. 91, 256802. (doi:10.1103/PhysRevLett.91.256802)
    • (2003) Phys. Rev. Lett. , vol.91 , pp. 256802
    • Rohlfing, M.1    Wang, N.-P.2    Krüger, P.3    Pollmann, J.4
  • 33
    • 77950176472 scopus 로고    scopus 로고
    • Modeling process variability in scaled CMOS technology
    • doi:10.1109/MDT.2010.50
    • Saha, S. K. 2010 Modeling Process Variability in Scaled CMOS Technology. IEEE Design Test Comput. 27, 8-16. (doi:10.1109/MDT.2010.50)
    • (2010) IEEE Design Test Comput. , vol.27 , pp. 8-16
    • Saha, S.K.1
  • 34
    • 0037774744 scopus 로고    scopus 로고
    • Distribution of grain boundaries in magnesia as a function of five macroscopic parameters
    • doi:10.1016/S1359-6454 03 00181-2
    • Saylor, D. M., Morawiec, A. & Rohrer, G. S. 2003 Distribution of grain boundaries in magnesia as a function of five macroscopic parameters. Acta Mater. 51, 3663. (doi:10.1016/S1359-6454 (03) 00181-2)
    • (2003) Acta Mater , vol.51 , pp. 3663
    • Saylor, D.M.1    Morawiec, A.2    Rohrer, G.S.3
  • 35
    • 0016597193 scopus 로고
    • The electrical properties of polycrystalline silicon films
    • doi:10.1063/1.321593
    • Seto, J. Y. W. 1975 The electrical properties of polycrystalline silicon films. J. Appl. Phys. 46, 5247. (doi:10.1063/1.321593)
    • (1975) J. Appl. Phys. , vol.46 , pp. 5247
    • Seto, J.Y.W.1
  • 37
    • 0033904438 scopus 로고    scopus 로고
    • Relative energies of surface and defect states: Ab initio calculations for the MgO (001) surface
    • DOI 10.1016/S0039-6028(00)00290-9
    • Sushko, P. V., Shluger, A. L. & Catlow, C. R. A. 2000 Relative energies of surface and defect states: ab initio calculations for the MgO (001) surface. Surf. Sci. 450, 153-170. (doi:10.1016/S0039-6028 (00) 00290-9) (Pubitemid 30585350)
    • (2000) Surface Science , vol.450 , Issue.3 , pp. 153-170
    • Sushko, P.V.1    Shluger, A.L.2    Catlow, C.R.A.3
  • 39
    • 2442700089 scopus 로고    scopus 로고
    • Surface electrification of rocks and charge trapping centers
    • DOI 10.1016/j.pce.2003.09.016, PII S147470650400035X
    • Takeuchi, A., Nagahamab, H. & Hashimotoa, T. 2004 Surface electrification of rocks and charge trapping centers. Phys. Chem. Earth, Parts A/B/C 29, 359-366. (doi:10.1016/j.pce.2003.09.016) (Pubitemid 38672785)
    • (2004) Physics and Chemistry of the Earth , vol.29 , Issue.4-9 , pp. 359-366
    • Takeuchi, A.1    Nagahama, H.2    Hashimoto, T.3
  • 40
    • 79959983697 scopus 로고    scopus 로고
    • NWChem: An open-source computational chemistry package
    • Valiev, M., et al. 2010 NWChem: an open-source computational chemistry package. Comput. Phys. Commun. X, X.
    • (2010) Comput. Phys. Commun. , vol.10
    • Valiev, M.1
  • 41
    • 79956058147 scopus 로고    scopus 로고
    • Materials with a high secondary-electron yield for use in plasma displays
    • DOI 10.1063/1.1464229
    • Vink, T. J., Balkenende, A. R., Verbeek, R. G. F. A., van Hal, H. A. M. & de Zwart, S. T. 2002 Materials with a high secondary-electron yield for use in plasma displays. Appl. Phys. Lett. 80, 2216. (doi:10.1063/1.1464229) (Pubitemid 34635974)
    • (2002) Applied Physics Letters , vol.80 , Issue.12 , pp. 2216
    • Vink, T.J.1    Balkenende, A.R.2    Verbeek, R.G.F.A.3    Van Hal, H.A.M.4    De Zwart, S.T.5
  • 42
    • 33144467451 scopus 로고    scopus 로고
    • Are the structures of twist grain boundaries in silicon ordered at 0 K?
    • doi:10.1103/PhysRevLett. 96.055505
    • von Alfthan, S., Haynes, P. D., Kaski, K. & Sutton, A. P. 2006 Are the structures of twist grain boundaries in silicon ordered at 0 K? Phys. Rev. Lett. 96, 055505. (doi:10.1103/PhysRevLett. 96.055505)
    • (2006) Phys. Rev. Lett. , vol.96 , pp. 055505
    • Von Alfthan, S.1    Haynes, P.D.2    Kaski, K.3    Sutton, A.P.4
  • 43
    • 0442295642 scopus 로고    scopus 로고
    • Improved off-current and subthreshold slope in aggressively scaled poly-Si TFTs with a single grain boundary in the channel
    • doi:10.1109/TED.2003.821577
    • Walker, P. M., Mizuta, H., Uno, S., Furuta, Y. & Hasko, D. G. 2004 Improved off-current and subthreshold slope in aggressively scaled poly-Si TFTs with a single grain boundary in the channel. IEEE Trans. Electron. Dev. 51, 212-219. (doi:10.1109/TED.2003.821577)
    • (2004) IEEE Trans. Electron. Dev. , vol.51 , pp. 212-219
    • Walker, P.M.1    Mizuta, H.2    Uno, S.3    Furuta, Y.4    Hasko, D.G.5
  • 44
    • 71049184056 scopus 로고    scopus 로고
    • Individual charge-trapping dislocations in an ionic insulator
    • doi:10.1063/1.3259778
    • Wang, Z., Tsukimoto, S., Saito, M. & Ikuhara, Y. 2009 Individual charge-trapping dislocations in an ionic insulator. Appl. Phys. Lett. 95, 184101. (doi:10.1063/1.3259778)
    • (2009) Appl. Phys. Lett. , vol.95 , pp. 184101
    • Wang, Z.1    Tsukimoto, S.2    Saito, M.3    Ikuhara, Y.4
  • 45
    • 67650102619 scopus 로고    scopus 로고
    • Redox-based resistive switching memories-nanoionic mechanisms, prospects, and challenges
    • doi:10.1002/adma.200900375
    • Waser, R., Dittmann, R., Staikov, G. & Szot, K. 2009 Redox-based resistive switching memories-nanoionic mechanisms, prospects, and challenges. Adv. Mater. 21, 2632. (doi:10.1002/adma.200900375)
    • (2009) Adv. Mater , vol.21 , pp. 2632
    • Waser, R.1    Dittmann, R.2    Staikov, G.3    Szot, K.4
  • 46
    • 0345927893 scopus 로고    scopus 로고
    • Atomistic simulation of dislocations, surfaces and interfaces in MgO
    • doi:10.1039/ft9969200433
    • Watson, G. W., Kelsey, E. T., de Leeuw, N. H., Harris, D. J. & Parker, S. C. 1996 Atomistic simulation of dislocations, surfaces and interfaces in MgO. J. Chem. Soc., Faraday Trans. 92, 433. (doi:10.1039/ft9969200433)
    • (1996) J. Chem. Soc., Faraday Trans. , vol.92 , pp. 433
    • Watson, G.W.1    Kelsey, E.T.2    Leeuw, N.H.3    Harris, D.J.4    Parker, S.C.5
  • 47
    • 4243848273 scopus 로고    scopus 로고
    • Impurity-induced structural transformation of a MgO grain boundary
    • doi:10.1103/PhysRevLett.81.3675
    • Yan, Y., Chisholm, M. F., Duscher, G., Maiti, A., Pennycook, S. J. & Pantelides, S. T. 1998 Impurity-induced structural transformation of a MgO grain boundary. Phys. Rev. Lett. 81, 3675. (doi:10.1103/PhysRevLett.81.3675)
    • (1998) Phys. Rev. Lett. , vol.81 , pp. 3675
    • Yan, Y.1    Chisholm, M.F.2    Duscher, G.3    Maiti, A.4    Pennycook, S.J.5    Pantelides, S.T.6
  • 48
    • 33646786054 scopus 로고    scopus 로고
    • Grain-boundary physics in polycrystalline CuInSe2 revisited: Experiment and theory
    • doi:10.1103/PhysRevLett. 96.205501
    • Yan, Y., Noufi, R. & Al-Jassim, M. M. 2006 Grain-boundary physics in polycrystalline CuInSe2 revisited: experiment and theory. Phys. Rev. Lett. 96, 205501. (doi:10.1103/PhysRevLett. 96.205501)
    • (2006) Phys. Rev. Lett. , vol.96 , pp. 205501
    • Yan, Y.1    Noufi, R.2    Al-Jassim, M.M.3
  • 49
    • 46049085611 scopus 로고    scopus 로고
    • Tunneling atomic-force microscopy as a highly sensitive mapping tool for the characterization of film morphology in thin high-k dielectrics
    • doi:10.1063/1.2953068
    • Yanev V. et al. 2008 Tunneling atomic-force microscopy as a highly sensitive mapping tool for the characterization of film morphology in thin high-k dielectrics. Appl. Phys. Lett. 92, 252910. (doi:10.1063/1.2953068)
    • (2008) Appl. Phys. Lett. , vol.92 , pp. 252910
    • Yanev, V.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.