Freeform and SMO

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7973, Issue , 2011, Pages

  Socha, Robert ^a  

^a ASML US Inc   (United States)

Author keywords

Illumination; Mask; Optimization; Polarization; SMO; Source; Transverse electric; Transverse magnetic; Wafer thin film

Indexed keywords

SMO; SOURCE; TRANSVERSE ELECTRICS; TRANSVERSE MAGNETIC; WAFER THIN-FILM;

PIXELS; POLARIZATION;

MASKS;

EID: 79959213944     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.883317     Document Type: Conference Paper

References (12)

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