Customized illumination aperture filter for low k1 photolithography process

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4000, Issue , 2000, Pages

  Gau, Tsai Sheng ^a   Liu, Ru Gun ^a   Chen, Chun Kuang ^a   Lai, Chih Ming ^a   Liang, Fu Jye ^a   Hsia, Chin C ^a  

^a Process Development Dept   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; OPTICAL FILTERS; OPTICAL RESOLVING POWER;

ILLUMINATION APERTURE FILTER;

PHOTOLITHOGRAPHY;

EID: 0033725368     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)