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Volumn 7140, Issue , 2008, Pages
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An innovative source-mask co-optimization (SMO) method for extending low k1 imaging
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Author keywords
Co optimization; Continuous transmission mask (CTM); Cost function; Diffraction optical element (DOE); Edge placement error (EPE); Freeform source; Illuminator; Low k1; Mask
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Indexed keywords
CO-OPTIMIZATION;
CONTINUOUS TRANSMISSION MASK (CTM);
DIFFRACTION OPTICAL ELEMENT (DOE);
EDGE PLACEMENT ERROR (EPE);
FREEFORM SOURCE;
ILLUMINATOR;
LOW K1;
CAPACITANCE;
COST FUNCTIONS;
COSTS;
DENSITY (OPTICAL);
DIFFRACTION;
DIFFRACTIVE OPTICAL ELEMENTS;
MASKS;
OPTIMIZATION;
PHOTOLITHOGRAPHY;
SCANNING;
WINDOWS;
ITERATIVE METHODS;
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EID: 62449227890
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.806657 Document Type: Conference Paper |
Times cited : (65)
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References (5)
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