LTCC active oxygen getter module for hermetic packaging applications

4th IMAPS/ACerS International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies 2008, CICMT 2008

Volumn , Issue , 2008, Pages 309-314

  Maeder, Thomas ^a   Dumontier, Nicolas ^a   Haller, Timothée ^a   Fournier, Yannick ^a   Seigneur, Frank ^a   Ryser, Peter ^a  

^a EPFL   (Switzerland)

Author keywords

Controlled atmosphere packaging; LTCC micro hotplate; Oxygen getter materials

Indexed keywords

BIOLOGICAL FIELDS; ELECTRICAL RESISTANCES; HERMETIC PACKAGING; INTEGRATED PACKAGES; MICRO HOTPLATE; OXYGEN PRESSURE; THICK-FILM TECHNOLOGY; VACUUM ENVIRONMENT;

CERAMIC MATERIALS; GETTERS; INCLUSIONS; IONIZATION OF GASES; MICROSYSTEMS; NITROGEN; OXYGEN; PACKAGING MATERIALS; SPACE PLATFORMS;

PACKAGING;

EID: 79958147417     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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