Development of a low-power 700°C micro heater in low temperature cofire ceramics

15th European Microelectronics and Packaging Conference and Exhibition, EMPC 2005 - Conference Programme and Proceedings

Volumn , Issue , 2005, Pages 85-89

  Reddy, Swapna Narayana ^a   Wang, Jian ^a   Jones, W Kinzy ^a  

^a Florida International University   (United States)

Author keywords

LTCC; Micro cavities; Microheater; Radiation shielding

Indexed keywords

ELECTRIC POWER UTILIZATION; HEATING EQUIPMENT; MICROELECTRONICS; RADIATION; TEMPERATURE;

DOMINANT FACTOR; HIGH TEMPERATURE; LOW TEMPERATURES; LTCC; MANUFACTURABILITY; MICROHEATER; THERMAL CONDUCTION; THERMAL IMPEDANCE;

RADIATION SHIELDING;

EID: 84939529005     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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3. Sergent, Jerry E., Harper, Charles, A., Hybrid Microelectronics Handbook, New York: McGaw Hill, (1995).
4. I.G. Sberveglieri, W. Hellmich, G. Müller, "Silicon hotplates for metal oxide gas sensor elements", Microsyst. Technol. 3 (1997) 183-190.
5. Richard A. Lopez, "Development of a sensor for the selective detection of halogen containing gases", Florida International University, 2001.
6. Holman, J.P., Heat Transfer, Tata McGraw-Hill Edition 2004.