A method to evaluate internal cavity pressure of sealed MEMS devices

15th European Microelectronics and Packaging Conference and Exhibition, EMPC 2005 - Conference Programme and Proceedings

Volumn , Issue , 2005, Pages 599-603

  De Coster, J ^a   Jourdain, A ^b   Puers, R ^a   Tilmans, H A C ^b  

^a UNIVERSITY OF LEUVEN   (Belgium)

^b IMEC   (Belgium)

Author keywords

MEMS resonator; Wafer level packaging

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; QUALITY CONTROL; RESONATORS;

AMBIENT PRESSURES; CAPACITIVE RF MEMS SWITCH; CAVITY PRESSURE; INTERNAL CAVITIES; MECHANICAL RESONATORS; MEMS RESONATORS; MOVING STRUCTURES; WAFER LEVEL PACKAGING;

PACKAGING;

EID: 70349953990     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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