Hot-plate gas sensors - Are ceramics better?

Proceedings - 2005 IMAPS/ACerS 1st International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2005

Volumn , Issue , 2005, Pages 343-348

  Kita, Jaroslaw ^a   Rettig, Frank ^a   Moos, Ralf ^a   Drüe, Karl Heinz ^b   Thust, Heiko ^b  

^a UNIVERSITY OF BAYREUTH   (Germany)

^b ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Ceramic hot plate; Gas sensor; Long term stability; Low temperature cofired ceramics; LTCC

Indexed keywords

CERAMIC HOT-PLATE; LASER STRUCTURING; LONG TERM STABILITY; LOW TEMPERATURE CO-FIRED CERAMICS; LOW-POWER CONSUMPTION; LTCC; MEASUREMENT AND ANALYSIS; SUBSTRATE MATERIAL;

ALUMINA; CHEMICAL SENSORS; ELECTRIC PROPERTIES; EXHIBITIONS; GAS DETECTORS; MICROSYSTEMS; PLATES (STRUCTURAL COMPONENTS); TECHNOLOGY; THERMAL CONDUCTIVITY;

CERAMIC MATERIALS;

EID: 33745790010     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. Sberveglieri G., Hellniich W., Miiller G., Silicon hotplates for metal oxide gas sensors elements. Microsystem Technologies 3 (1997). pp. 183- 190.
2. Simon I., Barsan N., Bauer M., Weimar U., Micromachined metal oxide gas sensors: opportunities to improve sensor performance. Sensor & Actuators B - Chemical, vol. 73 (2001), p. 1-26.
3. Rettig F, Moos R., Ceramic meso hot-plates for gas sensors. Sensors and Actuators B: Chemical. Vol. 103 (2004). pp. 91-97.
4. Kita J., Rettig F., Moos R., Laser forming substrates for hot-plate gas sensors, Journal of Microelectronics and Electronic Packaging (in printing)
5. DIN IEC 751: Industrial platinum resistance thermometer sensors, edition 1983 (Status as 1986).