Lorentz force mems magnetometer

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2010, Pages 45-48

  Thompson, M J ^a   Horsley, D A ^a  

^a University of California Davis   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ATMOSPHERIC PRESSURE; BROWNIAN MOVEMENT; LORENTZ FORCE; MAGNETOMETERS; MICROSYSTEMS;

AMBIENT PRESSURES; ANGULAR RESOLUTION; BROWNIAN; BROWNIAN NOISE; FIELD SENSITIVITY; FULLY COMPATIBLE; MEMS INERTIAL SENSORS; PARAMETRIC AMPLIFICATION;

SOLID-STATE SENSORS;

EID: 79953775416     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31438/trf.hh2010.12     Document Type: Conference Paper

References (4)

1. H. Emmerich and M. Schofthaler, “Magnetic field measurements with a novel surface micromachined magnetic-field sensor,” IEEE Trans. Electron Dev., 47(5), pp. 972-977, (2000).
2. M.J. Thompson and D.A. Horsley, “Resonant MEMS magnetometer with capacitive read-out,” Proc. IEEE Sensors 2009, Christchurch, NZ, 992, (2009).
3. M.J. Thompson and D.A. Horsley, “Parametrically-amplified MEMS magnetometer,” Proc. 15th Int. Conf. Solid-State Sensors Actuators & Microsystems (Transducers 2009), Denver, Colorado, 1194, (2009).
4. D. Rugar and P. Grutter, “Mechanical parametric amplification and thermomechanical noise squeezing,” Phys. Rev. Lett., 67(6), pp. 699-672, (1991).