Resonant MEMS magnetometer with capacitive read-out

Proceedings of IEEE Sensors

Volumn , Issue , 2009, Pages 992-995

  Thompson, Matthew J ^a   Horsley, David A ^a  

^a University of California Davis   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

3 DB BANDWIDTH; BROWNIAN NOISE; ELECTRONIC COMPASS; FABRICATION TECHNOLOGIES; MEMS ACCELEROMETER; MEMSDEVICES; NOISE FLOOR; QUALITY FACTORS; SINGLE CHIPS; SOI-MEMS;

ATMOSPHERIC PRESSURE; FLOORS; LORENTZ FORCE; MAGNETIC FIELD EFFECTS; MAGNETOMETERS;

SENSORS;

EID: 77951104505     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2009.5398216     Document Type: Conference Paper

References (7)

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7. M. Bao and H. Yang, "Squeeze film air damping in MEMS," Sens. Actuators A, vol.136, pp. 3-27, 2007.