Parametrically amplified MEMS magnetometer

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1194-1197

  Thompson, Matthew J ^a   Horsley, David A ^a  

^a University of California Davis   (United States)

Author keywords

Lorentz force; Magnetometer; Parametric; Parametric amplification

Indexed keywords

BROWNIAN FORCES; BROWNIAN NOISE; FORCE SENSOR; LINEAR RESONATOR; LORENTZ; MECHANICAL SENSITIVITY; PARAMETRIC; PARAMETRIC AMPLIFICATION; QUALITY FACTORS; RMS DISPLACEMENTS; STABLE MAGNETIC FIELD;

ACTUATORS; AMPLIFICATION; LORENTZ FORCE; MAGNETIC FIELD EFFECTS; MAGNETOMETERS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; SIGNAL TO NOISE RATIO;

SOLID-STATE SENSORS;

EID: 71449125058     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285917     Document Type: Conference Paper

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