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Volumn 142, Issue 2, 2008, Pages 561-568

A 3D micromechanical compass

Author keywords

Magnetometers; MEMS; Micromechanics; Resonant sensors

Indexed keywords

LORENTZ FORCE; MEMS; MICROMECHANICS; PORTABLE EQUIPMENT; SINGLE CRYSTALS; THREE DIMENSIONAL;

EID: 39749125203     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.08.025     Document Type: Article
Times cited : (81)

References (7)
  • 2
    • 0032186951 scopus 로고    scopus 로고
    • Magnetic-field measurements using an integrated resonant magnetic-field sensor
    • Kádár Zs., Bossche A., Sarro P.M., and Mollinger J.R. Magnetic-field measurements using an integrated resonant magnetic-field sensor. Sens. Actuators A 70 (1998) 225
    • (1998) Sens. Actuators A , vol.70 , pp. 225
    • Kádár, Zs.1    Bossche, A.2    Sarro, P.M.3    Mollinger, J.R.4
  • 3
    • 0037979846 scopus 로고    scopus 로고
    • Magnetic field measurements with a novel surface micromachined magnetic-field sensor
    • Emmerich H., and Schöfthaler M. Magnetic field measurements with a novel surface micromachined magnetic-field sensor. IEEE Trans. Electron Dev. 47 (2000) 972
    • (2000) IEEE Trans. Electron Dev. , vol.47 , pp. 972
    • Emmerich, H.1    Schöfthaler, M.2
  • 5
    • 39749152425 scopus 로고    scopus 로고
    • J. Kyynäräinen, J. Saarilahti, H. Kattelus, T. Meinander, M. Suhonen, A. Oja, H. Seppä, P. Pekko, H. Kuisma, S. Ruotsalainen, M. Tilli, 3D Micromechanical Compass, Proceedings of the 6th European Conference on Magnetic Sensors and Actuators, Bilbao, Spain, July 3-5, 2006, Sensor Letters, in press.
    • J. Kyynäräinen, J. Saarilahti, H. Kattelus, T. Meinander, M. Suhonen, A. Oja, H. Seppä, P. Pekko, H. Kuisma, S. Ruotsalainen, M. Tilli, 3D Micromechanical Compass, Proceedings of the 6th European Conference on Magnetic Sensors and Actuators, Bilbao, Spain, July 3-5, 2006, Sensor Letters, in press.
  • 6
    • 39749190274 scopus 로고    scopus 로고
    • K. Funk, W. Frey, Magnetic field sensor having deformable conductor loop segment, US Patent 6486665 B1 (2002).
    • K. Funk, W. Frey, Magnetic field sensor having deformable conductor loop segment, US Patent 6486665 B1 (2002).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.