Microscale glass-blown three-dimensional spherical shell resonators

Journal of Microelectromechanical Systems

Volumn 20, Issue 3, 2011, Pages 691-701

  Prikhodko, Igor P ^a   Zotov, Sergei A ^a   Trusov, Alexander A ^a   Shkel, Andrei M ^a  

^a University of California at Irvine   (United States)

Author keywords

3 D MEMS; Fabrication; glass; glassblowing; microscale sphere; resonator; spherical shell; vibration; wafer level micromachining; wineglass mode

Indexed keywords

3-D MEMS; GLASS-BLOWING; MICRO-SCALES; SPHERICAL SHELL; VIBRATION; WAFER LEVEL; WINEGLASS MODE;

FABRICATION; GLASS; NAVIGATION; RESONATORS; SHELLS (STRUCTURES); SURFACE TENSION; THREE DIMENSIONAL;

SPHERES;

EID: 79957994258     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2127453     Document Type: Article

References (31)

1. C. Nguyen. (2007, Feb.). MEMS technology for timing and frequency control. IEEE Trans. Ultrason., Ferroelectr., Freq. Control [Online]. 54(2), pp. 251-270. Available: http://ieeexplore.ieee.org/lpdocs/epic03/ wrapper.htm?arnumber=4107685
2. S. Tabatabaei and A. Partridge. (2010, Mar./Apr.). Silicon MEMS oscillators for high-speed digital systems. IEEE Micro [Online]. 30(2), pp. 80-89. Available: http://ieeexplore.ieee.org/lpdocs/epic03/ wrapper.htm? arnumber=5446253
3. W.-T. Hsu, "Recent progress in silicon {MEMS} oscillators," in Proc. 40th Annu. PTTI Meeting, Reston, Virginia, 2008, pp. 135-146.
4. C. Lam, "A review of the recent development of {MEMS} and crystal oscillators and their impacts on the frequency control products industry," in Proc. IEEE Ultrason. Symp., Nov. 2008, pp. 694-704.
5. M. J. Madou, Fundamentals of Microfabrication: The Science of Miniaturization, 2nd ed. Boca Raton, FL: CRC, 2002.
6. IEEE Standard Specification Format Guide and Test Procedure for Coriolis Vibratory Gyros, IEEE Std 1431-2004, 2004.
7. F. Niordson. (1984). Free vibrations of thin elastic spherical shells. Int. J. Solids Struct. [Online]. 20(7), pp. 667-687. Available: http://linkinghub.elsevier.com/retrieve/pii/0020768384900234 (Pubitemid 14668107)
8. K. D. Wise, M. G. Robinson, and W. J. Hillegas. (1981, Apr.). Solidstate processes to produce hemispherical components for inertial fusion targets. J. Vac. Sci. Technol. [Online]. 18(3), pp. 1179-1182. Available: http://link.aip.org/link/?JVS/18/1179/1&Agg=doi (Pubitemid 12455826)
9. H. Hashimoto, S. Tanaka, K. Sato, I. Ishikawa, S. Kato, and N. Chubachi. (1993, May). Chemical isotropic etching of singlecrystal silicon for acoustic lens of scanning acoustic microscope. Jpn. J. Appl. Phys. [Online]. 32(5B), pt. 1, pp. 2543-2546. Available: http://jjap.ipap.jp/link?JJAP/32/2543/ (Pubitemid 23715025)
10. Y. Desta, M. Murphy, J. Goldie, J. Kiley, and R. Howatt, "Fabrication of micromachined resonating cylinder gyroscopes," in Proc. Book Abstract 4th Int. Workshop HARMST, Baden-Baden, Germany, 2001, pp. 259-260.
11. V. S. Ilchenko, M. L. Gorodetsky, X. S. Yao, and L. Maleki. (2001, Mar.). Microtorus: A high-finesse microcavity with whisperinggallery modes. Opt. Lett. [Online]. 26(5), pp. 256-258. Available: http://www.opticsinfobase.org/ abstract.cfm?URI=ol-26-5-256 (Pubitemid 33693215)
12. D. H. Broaddus, M. A. Foster, I. H. Agha, J. T. Robinson, M. Lipson, and A. L. Gaeta. (2009, Apr.). Silicon-waveguide-coupled high-Q chalcogenide microspheres. Opt. Exp. [Online]. 17(8), pp. 5998-6003. Available: http://www.opticsinfobase.org/abstract.cfm?URI=oe-17-8-5998
13. J. Schroers, Q. Pham, A. Peker, N. Paton, and R. V. Curtis. (2007, Aug.). Blow molding of bulk metallic glass. Scripta Mater. [Online]. 57(4), pp. 341-344. Available: http://linkinghub.elsevier.com/retrieve/ pii/S1359646207003132 (Pubitemid 46881140)
14. S. Zotov, I. Prikhodko, A. Trusov, and A. Shkel, "3-D micromachined spherical shell resonators with integrated electromagnetic and electrostatic transducers," in Proc. Solid State Sens., Actuator Microsyst. Workshop, Hilton Head Island, South Carolina, 2010, pp. 11-14.
15. E. J. Eklund andA.M. Shkel. (2007, Apr.). Glass blowing on awafer level. J. Microelectromech. Syst. [Online]. 16(2), pp. 232-239. Available: http: //ieeexplore.ieee.org/lpdocs/epic03/wrapper.htm?arnumber=4147583
16. E. J. Eklund, A. M. Shkel, S. Knappe, E. Donley, and J. Kitching. (2008, May). Glass-blown spherical microcells for chip-scale atomic devices. Sens. Actuators A, Phys. [Online]. 143(1), pp. 175-180. Available: http://linkinghub.elsevier.com/retrieve/pii/S0924424707007145 (Pubitemid 351417374)
17. A. Love, A Treatise on the Mathematical Theory of Elasticity. Cambridge, U.K.: Cambridge Univ. Press, 1927.
18. A. Van Der Neut, De Elastische Stabiliteit van den Dunwandigen Bol. Amsterdam, The Netherlands: H.J. Paris, 1932.
19. A. Havers, "Asymptotische biegetheorie der unbelasteten kugelschale," Arch. Appl. Mech., vol. 6, no. 4, pp. 282-312, Aug. 1935.
20. K. Federhofer, "Eigenschwingungen der kegelschale," Arch. Appl. Mech., vol. 9, no. 4, pp. 288-308, Aug. 1938.
21. V. Novozhilov, "Stress analysis in a thin spherical shell under arbitrary load," Proc. USSR Acad. Sci. (Dokl. Akad. Nauk SSSR), vol. 27, no. 6, pp. 537-540, 1940.
22. V. Novozhilov, The Theory of Thin Shells. Groningen, The Netherlands: Noordhoff, 1959.
23. R. Blevins, Formulas for Natural Frequency and Mode Shape. New York: Van Nostrand, 1979.
24. E. J. Loper, D. D. Lynch, and K.M. Stevenson, "Projected performance of smaller hemispherical resonator gyros," in Proc. IEEE PLANS, LasVegas, NV, 1986, pp. 61-64. (Pubitemid 17537316)
25. C. T.-C. Nguyen, "Micromechanical signal processors," Ph.D. dissertation, Univ. California, Berkeley, CA, 1994.
26. P.-G. de Gennes, F. Brochard-Wyart, and D. Quere, Capillarity and Wetting Phenomena: Drops, Bubbles, Pearls, Waves. Berlin, Germany: Springer-Verlag, 2004.
27. V. I. Goleus, A. Y. Belyi, M. Sardak, and Y. I. Belyi. (1996, Aug.). Calculation of the surface tension of molten borosilicate glasses. Glass Ceram. [Online]. 53(8), pp. 226-228. Available: http://www.springerlink.com/ index/10.1007/BF01213775 (Pubitemid 126714401)
28. V. Braginsky, V. Mitrofanov, and V. Panov, Systems With Small Dissipation. Chicago, IL: Univ. Chicago Press, 1985.
29. G. K. Ho, R. Abdolvand, and F. Ayazi, "High-order composite bulk acoustic resonators," in Proc. Int. Conf. Micro Electro Mech. Syst., Jan. 2007, pp. 791-794.
30. A. N. Cleland and M. L. Roukes, "Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals," Appl. Phys. Lett., vol. 69, no. 18, pp. 2653-2655, Oct. 1996. (Pubitemid 126592903)
31. I. P. Prikhodko, S. A. Zotov, A. A. Trusov, and A. M. Shkel, "Mechanical characterization of micromachined glass-blown 3-D spherical shells," in Proc. Nanotech, vol. 2, Anaheim, CA, Jun. 20-24, 2010, pp. 300-303. [Online]. Available: http://www.nsti.org/procs/ Nanotech2010v2/6/W22. 903