3-D micromachined spherical shell resonators with integrated electromagnetic and electrostatic transducers

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2010, Pages 11-14

  Zotov, S A ^a   Prikhodko, I P ^a   Trusov, A A ^a   Shkel, A M ^a  

^a University of California at Irvine   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ASPECT RATIO; ELECTRODES; GLASS; MICROSYSTEMS; RESONATORS; SPHERES;

ELECTROSTATIC TRANSDUCERS; FABRICATION AND CHARACTERIZATIONS; HIGH ASPECT RATIO; INTEGRATED ELECTRODES; METAL ELECTRODES; MILLIMETER-SCALE; RELATIVE FREQUENCIES; RESONANT STRUCTURES;

SOLID-STATE SENSORS;

EID: 79958003402     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31438/trf.hh2010.3     Document Type: Conference Paper

References (6)

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5. F. I. Niordson, “Free Vibrations of Thin Elastic Spherical Shells,” Int. J. Solids Structures, vol. 20, pp. 667-687, 1984.
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