A vacuum-driven peristaltic micropump with valved actuation chambers

Journal of Micromechanics and Microengineering

Volumn 21, Issue 6, 2011, Pages

  Cui, Jianguo ^a,b   Pan, Tingrui ^b  

^a CHONGQING UNIVERSITY OF TECHNOLOGY   (China)

^b University of California Davis   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR BUBBLES; BACKFLOW; CONTROL LOGIC; ELASTIC MEMBRANES; ELECTROMAGNETIC VALVES; EXPERIMENTAL CHARACTERIZATION; FLUID CONTENT; LASER MICRO-MACHINING; MAXIMAL FLOW RATE; MICRO PUMP; MICRO-FLOW; MICROFLUIDIC CHANNEL; NEGATIVE PRESSURES; PDMS MEMBRANE; PERISTALTIC MICROPUMPS; PERISTALTIC MOTION; PLASMA BONDING; POLYDIMETHYLSILOXANE PDMS; PRESSURE PULSE; PRESSURE WAVEFORMS; PULSED VACUUM; PUMPING RATE; VACUUM PRESSURE;

COLD STORAGE; COMPRESSED AIR; GAS PERMEABLE MEMBRANES; MICROCHANNELS; ORGANIC POLYMERS; PNEUMATICS; PUMPING (LASER); PUMPS; SILICONES; VACUUM; VALVES (MECHANICAL);

VACUUM TECHNOLOGY;

EID: 79957970113     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/6/065034     Document Type: Article

References (37)

1. Whitesides G M 2006 Nature 442 368-73
2. Beebe D J 2000 Proc. Natl Acad. Sci. USA 97 13488-93
3. Pan T and Wang W 2011 Ann. Biomed. Eng. 39 600-20
4. Hong J W, Chen Y, Anderson W and Quake S R 2006 J. Phys.: Condens. Matter 18 S691-701
5. Manz A, Graber N and Widmer H M 1990 Sensors Actuators B 1 244-8
6. Zhao S, Cong H and Pan T 2009 Lab Chip 9 1128
7. Amirouche F, Zhou Y and Johnson T 2009 Microsyst. Technol. 15 647-66
8. Kovacs G T A 1998 Micromachined Transducers Sourcebook (New York: McGraw-Hill)
9. Lin Q, Yang B, Xie J and Tai Y-C 2007 J. Micromech. Microeng. 17 220-8
10. Teymoori M M and Abbaspour-Sani E 2005 Sensors Actuators A 117 222-9
11. Xie J, Shih J, Lin Q, Yang B and Tai Y-C 2004 Lab Chip 4 495
12. Pan T, McDonald S J, Kai E M and Ziaie B 2005 J. Micromech. Microeng. 15 1021-6
13. Lindström M S, Mori K, Ohashi T and Andersson-Svahn H 2009 Electrophoresis 30 4166-71
14. Huang S-B, Wu M-H, Cui Z, Cui Z and Lee G-B 2008 J. Micromech. Microeng. 18 045008
15. Huang C-W, Huang S-B and Lee G-B 2006 J. Micromech. Microeng. 16 2265-72
16. Huang S-B, Wu M-H and Lee G-B 2009 Sensors Actuators B 142 389-99
17. Yang S-Y, Lin J-L and Lee G-B 2009 J. Micromech. Microeng. 19 035020
18. Chia B T, Liao H-H and Yang Y-J 2010 Sensors Actuators A 165 86-93
19. Grosjean C and Tai Y-C 1999 Proc. 10th Int. Conf. on Solid-State Sensors and Actuators (Sendai, Japan, 1999) pp 1776-9
20. Unger M A, Chou H-P, Thorsen T, Scherer A and Quake S R 2000 Science 288 113-6
21. Melin J and Quake S R 2007 Annu. Rev. Biophys. Biomol. Struct. 36 213-31
22. Wang C-H and Lee G-B 2006 J. Micromech. Microeng. 16 341-8
23. Yang Y-N, Hsiung S-K and Lee G-B 2008 Microfluid. Nanofluid. 6 823-33
24. Yang S-Y, Cheng F-Y, Yeh C-S and Lee G-B 2010 Microfluid. Nanofluid. 8 303-11
25. Lai H and Folch A 2011 Lab Chip 11 336-42
26. William A M S, Grover H, Liu C N, Lagally E T and Mathies R A 2003 Sensors Actuators B 89 315-23
27. Cooksey G A, Plant A L and Atencia J 2009 Lab Chip 9 1298-300
28. Atencia J, Morrow J and Locascio L E 2009 Lab Chip 9 2707-14
29. Matsuura Y, Uenoya T, Tsuchiya K, Uetsuji Y and Nakamachi E 2007 Proc. SPIE 6799 67990N
30. Schaff U Y, Xing M M Q, Lin K K, Pan N, Jeon N L and Simon S I 2007 Lab Chip 7 448-56
31. Chen A and Pan T 2011 Lab Chip 11 727-32
32. Jiang X N, Zhou Z Y, Huang X Y, Li Y Y Y and Liu C Y 1998 Sensors Actuators A 70 81-7
33. Giovanni M D 1982 Flat and Corrugated Diaphragm Design Handbook (New York: Dekker)
34. Armani D, Liu C and Aluru N 1999 Micro Electro Mechanical Systems, 1999. MEMS'99. 12th IEEE Int. Conf. (Orlando, FL, USA 1999) pp 222-7
35. Liu H-B and Gong H-Q 2009 J. Micromech. Microeng. 19 1-8
36. Jo B-H, Van Lerberghe L M, Motsegood K M and Beebe D J 2000 Microelectromech. Syst. 9 76-81
37. Hong L and Pan T 2010 Micro Electro Mechanical Systems (MEMS) 2010, 23rd IEEE Int. Conf. (Hong Kong, 2010) pp 420-3