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Volumn 176, Issue 11, 2011, Pages 846-849
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Optical and structural properties of Cu-doped β-Ga2O 3 films
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Author keywords
Optical band gap; Optical property; RF magnetron sputtering; Thermal annealing
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Indexed keywords
ANNEALING;
BINARY ALLOYS;
ENERGY GAP;
GALLIUM COMPOUNDS;
LIGHT ABSORPTION;
MAGNETRON SPUTTERING;
OPTICAL BAND GAPS;
OPTICAL FILMS;
SEMICONDUCTOR DOPING;
STRUCTURAL PROPERTIES;
ARGON MIXTURE;
BLUE-EMISSION;
CU-DOPED;
CU-DOPING;
POST-THERMAL ANNEALING;
QUARTZ SUBSTRATE;
R.F. MAGNETRON SPUTTERING;
SI SUBSTRATES;
THERMAL-ANNEALING;
UV EMISSIONS;
OPTICAL PROPERTIES;
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EID: 79957701149
PISSN: 09215107
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mseb.2011.04.014 Document Type: Article |
Times cited : (89)
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References (18)
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