Nano/micro particle beam for ceramic deposition and mechanical etching

Physica Scripta T

Volumn T139, Issue , 2010, Pages

  Chun, Doo Man ^a   Kim, Min Saeng ^a   Yeo, Jun Cheol ^b   Kim, Min Hyeng ^a   Lee, Caroline Sunyong ^c   Ahn, Sung Hoon ^a  

^a Seoul National University   (South Korea)

^b Seoul National University   (South Korea)

^c Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM OXIDES; CERAMIC POWDER; CHANNEL DEPTH; COATING THICKNESS; ETCHED SURFACE; GLASS SUBSTRATES; LOW VACUUM; MANUFACTURING PROCESS; MECHANICAL ETCHING; METAL SUBSTRATE; MICRO-SIZED POWDER; PROCESS CONDITION; ROOM TEMPERATURE; SMALL CHANNELS; SUPERSONIC NOZZLES; TEST RESULTS; THERMAL DAMAGE;

CERAMIC COATINGS; CERAMIC MATERIALS; ETCHING; FUNCTIONAL MATERIALS; NOZZLES; PARTICLE BEAM DYNAMICS; PARTICLE BEAMS; POWDER METALS; THICKNESS MEASUREMENT;

SUBSTRATES;

EID: 77954700393     PISSN: 02811847     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1088/0031-8949/2010/T139/014047     Document Type: Conference Paper

References (9)

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