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CIRP Annals - Manufacturing Technology

Volumn 60, Issue 1, 2011, Pages 403-406

A newly developed long range positioning table system with a sub-nanometer resolution

(3) Shinno, H a Yoshioka, H a Sawano, H a

a TOKYO INSTITUTE OF TECHNOLOGY (Japan)

Author keywords

Nano positioning; Table; Ultra precision

Indexed keywords

CO-OPERATIVE CONTROL; ERROR-FREE MEASUREMENTS; LASER INTERFEROMETER; LONG RANGE; NANO-POSITIONING; POSITIONING TABLES; SUBNANOMETER RESOLUTION; TABLE; ULTRA PRECISION;

LASER INTERFEROMETRY;

INTERFEROMETERS;

EID: 79957640920 PISSN: 00078506 EISSN: 17260604 Source Type: Journal
DOI: 10.1016/j.cirp.2011.03.027 Document Type: Article

Times cited : (44)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.