Nanometer positioning of a linear motor-driven ultraprecision aerostatic table system with electrorheological fluid dampers

CIRP Annals - Manufacturing Technology

Volumn 48, Issue 1, 1999, Pages 289-292

  Shinno, Hidenori ^a   Hashizume, Hitoshi ^a   Sato, Hisayoshi ^b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b CHUO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; BEARINGS (MACHINE PARTS); DAMPING; ERRORS; LINEAR MOTORS; MACHINE TOOLS; NANOTECHNOLOGY; SUSPENSIONS (FLUIDS);

ELECTRORHEOLOGICAL FLUID DAMPER; NANOPOSITIONING; ULTRAPRECISION AEROSTATIC TABLE SYSTEM; ULTRAPRECISION MACHINE;

POSITION CONTROL;

EID: 0032661382     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)63186-2     Document Type: Article

References (7)

1. Hashizume,H. and Shinno,H., 1998, Development of High Speed Nanometer Positioning Table System and Its Performances Evaluation, (in Japanese), Transactions of the JSME, 64/626: 4103-4108.
2. Kim,W.-J. and Trumper,D.L., 1997, Linear Motor- Levitated Stage for Photolithography, Annals of the CIRP, 46/1:447-450.
3. Tomita,Y.,Makino,K. and Sugimine,M., 1996, High- Response X-Y Stage System Driven by In-Parallel Linear Motors, Annals of the CIRP, 45/1: 359-362.
4. Williams,M.D., Trumper,D.L. and Hocken,R., 1993, Magnetic Bearing Stage for Photolithography, Annals of the CIRP, 42/1: 607-610.
5. Sato,C., Tsukamoto,S. and Shinno,H., 1995, Electrorheological Fluid Damper for a Slide Mechanism, U.S. Patent Office, Patent #5,462,361.
6. Hashizume,H., Shinno,H.,Ito,Y. and Sato,C., 1995, Characteristic Control of Table System Using Electrorheological Fluid (Comparison of Colloidal ERF with Liquid Crystal), (in Japanese), Transactions of the JSME, 61/590: 4105-4110.
7. Aoyama,T. and Inasaki,I., 1997, Application of Electrorheological Fluid Dampers to Machine Tool Elements, Annals of the CIRP, 46/1: 309-312.