Influence of contact effect on the performance of microcrystalline silicon thin-film transistors

Applied Physics Letters

Volumn 89, Issue 20, 2006, Pages

  Chan, Kah Yoong ^a,b   Bunte, Eerke ^b   Stiebig, Helmut ^b   Knipp, Dietmar ^a  

^a JACOBS UNIVERSITY BREMEN   (Germany)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER MOBILITY; CRYSTALLINE MATERIALS; ELECTRIC CONTACTS; ELECTRON MOBILITY; PARAMETER ESTIMATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; THRESHOLD VOLTAGE;

DEVICE PARAMETERS; SILICON THIN-FILM TRANSISTORS; SUBSTRATE TEMPERATURES; SUBTHRESHOLD SLOPES;

THIN FILM TRANSISTORS;

EID: 33751080721     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2390634     Document Type: Article

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