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Volumn 207, Issue 7, 2010, Pages 1694-1697

Systematic investigation on the effect of contact resistance on the performance of a-IGZO thin-film transistors with various geometries of electrodes

Author keywords

A IGZO TFT; Channel width; Contact resistance; Magnetron sputtering; ZrO 2

Indexed keywords

A-IGZO TFT; CHANNEL WIDTHS; DEVICE PERFORMANCE; ELECTRICAL PROPERTY; FIELD-EFFECT MOBILITIES; GATE INSULATOR; ON-CURRENTS; RF-MAGNETRON SPUTTERING; ROOM TEMPERATURE; SUBTHRESHOLD SWING; SYSTEMATIC INVESTIGATIONS; ZRO 2;

EID: 77955624103     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200983753     Document Type: Article
Times cited : (15)

References (11)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.