New perspectives for pressure and force sensors Thin films combining high gauge factor and low TCR

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7362, Issue , 2009, Pages

  Schultes, Guenter ^a   Koppert, Ralf ^a   Goettel, Dirk ^a   Freitag Weber, Olivia ^a   Probst, Anne C ^a   Werner, Ulf ^b  

^a Saarland University of Applied Sciences   (Germany)

^b INM LEIBNIZ INSTITUTE FOR NEW MATERIALS   (Germany)

Author keywords

Carbon; Encapsulated; Force sensors; Gauge factor; Graphite; Nickel clusters; Pressure; Strain gauge; TCR

Indexed keywords

ENCAPSULATED; FORCE SENSORS; GAUGE FACTOR; NICKEL CLUSTERS; STRAIN GAUGE; TCR;

ACTUATORS; AMORPHOUS CARBON; AMORPHOUS FILMS; CARBON CLUSTERS; ELECTRIC REACTORS; GRAPHITE; MECHANICAL PROPERTIES; MEMS; MICROELECTROMECHANICAL DEVICES; NICKEL; NICKEL ALLOYS; SMART SENSORS; STRAIN GAGES; THERMAL CONDUCTIVITY OF SOLIDS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

CARBON FILMS;

EID: 69949170449     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.820496     Document Type: Conference Paper

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