Microstructure and mechanical properties of Ag-containing diamond-like carbon films in mid-frequency dual-magnetron sputtering

Applied Surface Science

Volumn 256, Issue 5, 2009, Pages 1431-1435

  Wang, Chengbiao ^a   Yu, Xiang ^a   Hua, Meng ^b  

^a CHINA UNIVERSITY OF GEOSCIENCES   (China)

^b CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Ag content; Ag containing diamond like carbon film; Mechanical behavior; Microstructure

Indexed keywords

AMORPHOUS FILMS; CARBON FILMS; DIAMONDS; MECHANICAL PROPERTIES; MICROSTRUCTURE; NANOCRYSTALLITES; NANOCRYSTALS;

DUAL MAGNETRON SPUTTERING; DUAL MAGNETRONS; INTRINSIC STRESS; MECHANICAL BEHAVIOR; MICROSTRUCTURE AND MECHANICAL PROPERTIES; MID-FREQUENCIES; NANO GRAINS; SI SUBSTRATES;

DIAMOND LIKE CARBON FILMS;

EID: 70849117684     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.08.103     Document Type: Article

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