NanoNi@C: Supersensitive functional layer for pressure and force sensors;Nanoni@c: Hochempfindliche funktionsschicht für druck- und kraftsensoren

Technisches Messen

Volumn 77, Issue 12, 2010, Pages 631-637

  Koppert, Ralf ^a   Göttel, Dirk ^b   Schultes, G ^b   Werner, Ulf ^c  

^a Siegert TFT GmbH   (Germany)

^b HTW Saarbrücken ^*  (Germany)

^c INM LEIBNIZ INSTITUTE FOR NEW MATERIALS   (Germany)

Author keywords

Diamond like carbon (dlc); Gauge factor; Pressure sensors; Strain gauges; Strain sensitivity; Tcr

Indexed keywords

CARRIER TRANSPORT MECHANISMS; DIAMOND LIKE CARBON; ELECTRICAL MEASUREMENT; GAUGE FACTORS; HYSTERESIS MEASUREMENTS; LOW TEMPERATURE COEFFICIENTS; STRAIN SENSITIVITY; TCR;

CARBON; NICKEL; PRESSURE SENSORS; TRANSMISSION ELECTRON MICROSCOPY;

STRAIN GAGES;

EID: 78649507474     PISSN: 01718096     EISSN: None     Source Type: Journal    
DOI: 10.1524/teme.2010.0111     Document Type: Article

References (10)

1. M. Chhowala: a-C applications: overview and market potential. - In: Properties of Amorphous Carbon, pp. 311-312, 2002.
2. R. Koppert, D. Göttel, O. Freitag-Weber, G. Schultes: Nickel containing diamond like carbon thin films. - In: Sol. Stat. Sci., vol. 11 (10), pp. 1797-1800, 2009.
3. H. Lüthje, S. Biehl, R. Bandorf, J.-H. Sick, E. Peiner, A. Tibrewala: Preparation and characterization of multifunctional thin film sensors based on amorphous diamond-like-carbon. In: Transducers 05, pp. 2111-2114, 2005.
4. J. McLaughlin: Data storage using a-C. - In: Properties of Amorphous Carbon, pp. 329-332, 2001.
5. J. Robertson: Diamond-like amorphous carbon. - In: J. Mater. Sci. Eng. R, vol. 4, pp. 129-281, 2002.
6. Rusli, S. F. Yoon, Q. F. Huang: Hydrogenated a-C optical coatings. - In: Properties of Amorphous Carbon, pp. 344-347, 2002.
7. G. Schultes, P. Frey, D. Göttel, O. Freitag-Weber: Strain sensitivity of nickel-containing amorphous hydrogenated carbon (Ni:a-C:H) thin films prepared by r.f. sputtering using substrate bias conditions. - In: Diam. Rel. Mat., vol. 15, pp. 80-89, 2006.
8. G. Schultes, R. Koppert, D. Göttel, O. Freitag-Weber, U. Werner, W. Brode: Schichtwiderstand mit konstantem Temperaturkoeffizienten sowie Herstellung eines solchen Schichtwiderstands, eingereichtes Patent 2009, PCT/EP2009/002530.
9. K. Sedláčková, P. Lobotka, I. Vávra, G. Radnóczi: Structural, electrical and magnetic properties of carbon-nickel composite thin films. - In: Carbon, vol. 43, pp. 2192-2198, 2005.
10. A. Tibrewala, E. Peiner, R. Bandorf, S. Biehl, H. Lüthje: Longitudinal and transversal piezoresistive effect in hydrogenated amorphous carbon films. - In: Thin Solid Films, vol. 515 (20-21), pp. 8028-8033, 2007.