Formation and behavior of unbonded hydrogen in a-C:H of various compositions and densities

Surface and Coatings Technology

Volumn 203, Issue 24, 2009, Pages 3770-3776

  Houska, J ^a   Klemberg Sapieha, J E ^a   Martinu, L ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

Amorphous carbon; DLC; Hardness; Molecular dynamics; Unbonded hydrogen

Indexed keywords

AB-INITIO MOLECULAR DYNAMICS; ATOMIC SCALE PROCESS; C ATOMS; CARBON ATOMS; CARBON NETWORK; CHEMICAL VAPOR; DEPOSITION TEMPERATURES; DLC; EXPERIMENTAL CONDITIONS; FORMATION CONDITION; GASPHASE; H-CONTENT; HYDROGENATED AMORPHOUS CARBON (A-C:H); MATERIAL CHARACTERISTICS; MATERIAL COMPOSITIONS; MATERIAL DENSITY; STRUCTURE-BASED; TEMPERATURE DEPENDENCE; UNBONDED HYDROGEN;

ATOMS; CHEMICAL ANALYSIS; DYNAMICS; HARDNESS; HYDROGEN; ION BOMBARDMENT; MATERIALS; MOLECULAR DYNAMICS;

AMORPHOUS CARBON;

EID: 67650066315     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2009.06.022     Document Type: Article

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