Subwavelength-sized aperture fabrication in aluminum by a self-terminated corrosion process in the evanescent field

Applied Physics Letters

Volumn 80, Issue 18, 2002, Pages 3397-3399

  Haefliger, D ^a   Stemmer, A ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CORROSION PROCESS; EVANESCENT FIELDS; GLASS-WATER INTERFACE; HEAT-UP; HIGH QUALITY; LATERAL DIMENSION; NEAR-FIELD; ONE-STEP PROCESS; OPTICAL FIELD; OPTICAL RESOLUTION; PASSIVATING OXIDES; SCANNING NEAR-FIELD OPTICAL MICROSCOPE; TIP APEX; TRANSMISSION MODE;

ALUMINUM; CORROSION PREVENTION; NITRIDES; WATER ABSORPTION;

LIGHT TRANSMISSION;

EID: 79956035267     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1476059     Document Type: Article

References (23)

1. D. W. Pohl, W. Denk, and M. Lanz, Appl. Phys. Lett. 44, 651 (1984). apl APPLAB 0003-6951
2. E. Betzig, J. K. Trautman, T. D. Harris, J. S. Weiner, and R. L. Kostelak, Science 251, 1468 (1991). sci SCIEAS 0036-8075
3. J. A. Veerman, A. M. Otter, L. Kuipers, and N. F. van Hulst, Appl. Phys. Lett. 72, 3115 (1998). apl APPLAB 0003-6951
4. T. Saiki, S. Mononobe, M. Ohtsu, N. Saito, and J. Kusano, Appl. Phys. Lett. 68, 2612 (1996). apl APPLAB 0003-6951
5. D. Mulin, D. Courjon, J. P. Malugani, and B. Gauthier-Manuel, Appl. Phys. Lett. 71, 437 (1997). apl APPLAB 0003-6951
6. M. Radmacher, P. E. Hillner, and P. K. Hansma, Rev. Sci. Instrum. 65, 2737 (1994). rsi RSINAK 0034-6748
7. C. Mihalcea, W. Scholz, S. Werner, S. Münster, E. Oesterschulze, and R. Kassing, Appl. Phys. Lett. 68, 3531 (1996). apl APPLAB 0003-6951
8. H. Zhou, A. Midha, L. Bruchhaus, G. Mills, L. Donaldson, and J. M. R. Weaver, J. Vac. Sci. Technol. B 17, 1954 (1999). jvb JVTBD9 0734-211X
9. G. Schürmann, P. F. Indermühle, U. Staufer, and N. F. de Rooij, Surf. Interface Anal. 27, 299 (1999). sia SIANDQ 0142-2421
10. D. Haefliger and A. Stemmer, Appl. Phys. A: Mater. Sci. Process. 74, 115 (2002). mfc APAMFC 0947-8396
11. M. Pourbaix, Atlas of Electrochemical Equilibria in Aqueous Solutions (NACE, Houston, 1974).
12. P. A. Brook, Corros. Sci. 12, 297 (1972). crr CRRSAA 0010-938X
13. E. D. Palik, Handbook of Optical Constants of Solids III (Academic, San Diego, 1998).
14. (a) Datasheet BK 7 (Schott, Mainz);
15. (b) G. M. Hale and M. R. Querry, Appl. Opt. 12, 555 (1973); apo APOPAI 0003-6935
16. (c) J. H. Weaver, C. Krafka, D. W. Lynch, and E. E. Koch, Optical Properties of Metals (Fachinformationszentrum, Karlsruhe, 1981).
17. E. Hecht, Optics (Addison-Wesley, Reading, MA, 1998).
18. S. Shalom, K. Lieberman, A. Lewis, and S. R. Cohen, Rev. Sci. Instrum. 63, 4061 (1992). rsi RSINAK 0034-6748
19. Y. Inouye and S. Kawata, Opt. Lett. 19, 159 (1994). opl OPLEDP 0146-9592
20. T. Kalkbrenner, M. Graf, C. Durkan, J. Mlynek, and V. Sandoghdar, Appl. Phys. Lett. 76, 1206 (2000). apl APPLAB 0003-6951
21. G. Meyer and N. M. Amer, Appl. Phys. Lett. 53, 1045 (1988). apl APPLAB 0003-6951
22. G. Genolet, M. Despont, P. Vettiger, U. Staufer, W. Noell, N. F. de Rooij, T. Cueni, M. P. Bernal, and F. Marquis-Weible, Rev. Sci. Instrum. 72, 3877 (2001). rsi RSINAK 0034-6748
23. B. J. Kim, J. W. Flamma, E. S. Ten Have, M. F. Garcia-Parajo, N. F. van Hulst, and J. Brugger, J. Microsc. 202, 16 (2001). jmi JMICAR 0022-2720