Micromachined SPM probes with sub-100 nm features at tip apex

Surface and Interface Analysis

Volumn 27, Issue 5, 1999, Pages 299-301

  Schurmann G ^a   Indermuhle P F ^b   Staufer, U ^a   De Rooij, N F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ELECTROCHEMISTRY; ELECTRODES; MICROMACHINING; MICROSCOPES; NANOTECHNOLOGY; OPTICAL MICROSCOPY; PROBES; REACTIVE ION ETCHING; THIN FILMS;

ELECTROCHEMICAL MEASUREMENTS; NANOTOOLS; PYREX MICROFABRICATED TIPS; SCANNING NEAR FIELD OPTICAL MICROSCOPY PROBES; SCANNING PROBE MICROSCOPE;

FILM PREPARATION;

EID: 0040702916     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199905/06)27:5/6<299::AID-SIA510>3.0.CO;2-V     Document Type: Article

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