Structuring of aluminum films by laser-induced local oxidation in water

Applied Physics A: Materials Science and Processing

Volumn 74, Issue 1, 2002, Pages 115-118

  Haefliger, D ^a   Stemmer, A ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC INSULATING MATERIALS; ELECTRODES; LASER BEAM EFFECTS; METALLIC FILMS; OXIDATION; THERMAL EFFECTS;

ALUMINUM FILMS; INSULATING DOMAINS; PHOTO-THERMAL OXIDATION; TWO-DIMENSIONAL (2D) ELECTRODES;

ALUMINUM;

EID: 0001638965     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390100974     Document Type: Review

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