Improved thermal stability of wet-oxidized AlAs

Applied Physics Letters

Volumn 80, Issue 6, 2002, Pages 974-976

  Jia, H Q ^a   Chen, H ^a   Wang, W C ^a   Wang, W X ^a   Li, W ^a   Huang, Q ^a   Zhou, Junming ^a   Xue, Q K ^a  

^a INSTITUTE OF PHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

GAAS; NOMARSKI MICROSCOPY; OXIDATION CONDITIONS; OXIDIZATION; SANDWICHED STRUCTURE; SPECTROSCOPY MEASUREMENTS; VOLATILE PRODUCTS;

RAMAN SCATTERING; RAMAN SPECTROSCOPY;

THERMODYNAMIC STABILITY;

EID: 79955994823     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1448166     Document Type: Article

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