Integral-square-error performance of multiplexed model predictive control

IEEE Transactions on Industrial Informatics

Volumn 7, Issue 2, 2011, Pages 196-203

  Ling, Keck Voon ^a   Ho, Weng Khuen ^b   Feng, Yong ^b   Wu, Bingfang ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Control systems analysis; multiplexing; performance evaluation; predictive control; semiconductor process modeling

Indexed keywords

COMPUTATIONAL LOADS; CONTROL DESIGN; CONTROLLED SYSTEM; DISTURBANCE MODELS; PERFORMANCE EVALUATION; PREDICTIVE CONTROL; SAMPLING INTERVAL; SAMPLING RATES; SEMICONDUCTOR MANUFACTURING; SEMICONDUCTOR PROCESS MODELING; THERMAL PROCESS;

CONTROL SYSTEM ANALYSIS; MULTIPLEXING; PREDICTIVE CONTROL SYSTEMS; SAMPLING; SEMICONDUCTOR DEVICE MANUFACTURE; SYSTEMS ANALYSIS;

MODEL PREDICTIVE CONTROL;

EID: 79955818928     PISSN: 15513203     EISSN: None     Source Type: Journal    
DOI: 10.1109/TII.2011.2106451     Document Type: Article

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