Comprehensive CD uniformity control across lithography and etch

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5752, Issue II, 2005, Pages 692-701

  Zhang, Qiaolin ^a,b,d   Tang, Cherry ^c   Hsieh, Tony ^c   Maccrae, Nick ^c   Singh, Bhanwar ^c   Poolla, Kameshwar ^a,b   Spanos, Costas J ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c ADVANCED MICRO DEVICES   (United States)

^d UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Across wafer CDU; Critical Dimension uniformity (CDU); Minimax optimization; Multi objective optimization; Multi zone PEB bake plate; Plasma etching signature; Process control; Process modeling; Zone offsets

Indexed keywords

CONSTRAINED QUADRATIC OPTIMIZATION; CRITICAL DIMENSION (CD); CRITICAL DIMENSION UNIFORMITY (CDU); MINIMAX OPTIMIZATION;

COMPUTER SIMULATION; CONSTRAINT THEORY; OPTIMIZATION; PLASMA ETCHING; QUADRATIC PROGRAMMING;

LITHOGRAPHY;

EID: 24644435944     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.601087     Document Type: Conference Paper

References (7)

1. Q. Zhang, P. Friedberg, C. Tang, B. Singh, K. Poolla and C. Spanos, "Across-wafer CD Uniformity Enhancement through Control of Multi-zone PEB Profiles", Proc. Of SPIE, Vol. 5375, 2004.
2. Di Febbraro A, Minciardi R, Sacone S. Multi-objective optimization problems in manufacturing systems representable as timed event graphs. Symposium on Discrete Events and Manufacturing Systems. CESA'96 IMACS Multiconference. Computational Engineering in Systems Applications. Gerf EC Lille - Cite Scientifique. 1996, pp.334-9. Lille, France.
3. Sait SM, Youssef H, Ali H. Fuzzy simulated evolution algorithm for multi-objective optimization of VLSI placement. Proceedings of the 1999 Congress on Evolutionary Computation-CEC99 (Cat. No. 99TH8406). IEEE. Part Vol. 1, 1999, pp.91-7 Vol. 1. Piscataway, NJ, USA.
4. Jongen HT, Zwier G. On regular minimax optimization. Journal of Optimization Theory & Applications, vol.62, no.3, Sept. 1989, pp.419-47. USA.
5. Sen S. A class of algorithms for large scale nonlinear minimax optimization. Applied Mathematics & Computation, vol.18, no.4, June 1986, pp.355-61. USA.
6. J.L. Zhou and A.L. Tits, An SQP Algorithm for Finely Discretized Continuous Minimax Problems and Other Minimax Problems with Many Objective Functions, SIAM J. on Optimization, vol. 6, No. 2, 1996, pp. 461-487.
7. J. L. Zhou and A. L. Tits, Nonmonotone line search for minimax problems, J. Optim. Theory Appl. 76 (1993), pp. 455-476.