Neural network modeling for advanced process control using production data

IEEE Transactions on Semiconductor Manufacturing

Volumn 24, Issue 2, 2011, Pages 182-189

  Mevawalla, Zubin N ^a   May, Gary S ^a   Kiehlbauch, Mark W ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b MICRON TECHNOLOGY INC   (United States)

Author keywords

Neural networks; process modeling; sensitivity analysis; supervisory control

Indexed keywords

ADVANCED PROCESS CONTROL; AVERAGE PREDICTION ERROR; CRITICAL STEPS; EMPIRICAL PROCESS; FABRICATION PROCESS; INDUSTRIAL PROCESSS; MANUFACTURING PROCESS; MODEL-BASED; MULTIPLE INPUTS AND OUTPUTS; NEURAL NETWORK MODELING; NON-LINEAR; OUTPUT RESPONSE; PROCESS MODELING; PROCESS OPTIMIZATION; PRODUCTION DATA; SEQUENTIAL NEURAL NETWORKS; SUPERVISORY CONTROL; SUPERVISORY CONTROL SYSTEMS; UNIT PROCESS;

INTELLIGENT CONTROL; NEURAL NETWORKS; OPTIMIZATION; SENSITIVITY ANALYSIS;

PROCESS CONTROL;

EID: 79955643848     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2011.2115261     Document Type: Conference Paper

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