Comparative study of carbon monoxide gas sensing mechanism for the LTPS MOS Schottky diodes with various metal oxides

IEEE Sensors Journal

Volumn 11, Issue 5, 2011, Pages 1227-1232

  Juang, Feng Renn ^a   Fang, Yean Kuen ^a   Chiang, Yen Ting ^a   Chou, Tse Heng ^b   Lin, Cheng I ^a   Lin, Cheng Wei ^a   Liou, Yan Wei ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b WUFENG INSTITUTE OF TECHNOLOGY   (Taiwan)

Author keywords

Carbon monoxide (CO) sensor; ELA; low temperature poly silicon (LTPS); Schottky diode; SnO2

Indexed keywords

BAND GAPS; CO SENSORS; COMPARATIVE STUDIES; ELA; GAS SENSING MECHANISM; GLASS SUBSTRATES; LOW TEMPERATURES; METAL OXIDES; MONOXIDE GAS; RELATIVE SENSITIVITY; SCHOTTKY DIODES; SENSING ELEMENTS; SENSING MECHANISM; SNO2; SURFACE-TO-VOLUME RATIO; TIO; ZNO;

CARBON MONOXIDE; CHEMICAL DETECTION; DIODES; ENERGY GAP; GAS DETECTORS; GAS SENSING ELECTRODES; POLYSILICON; SCHOTTKY BARRIER DIODES; SENSORS; SUBSTRATES; ZINC OXIDE;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 79955410872     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2010.2091404     Document Type: Article

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