DC-Contact RF MEMS switches using Thin-Film cantilevers

2008 European Microwave Integrated Circuit Conference, EuMIC 2008

Volumn , Issue , 2008, Pages 382-385

  Shen, Hui ^a   Gong, Songbin ^a   Barker, N Scott ^a  

^a UNIVERSITY OF VIRGINIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATION VOLTAGES; BUILDING BLOCK; FABRICATION PROCESS; RF-MEMS; RF-MEMS SWITCHES; SACRIFICIAL LAYER; SPST SWITCH; TRUE TIME DELAY;

DELAY CIRCUITS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROWAVE INTEGRATED CIRCUITS; NANOCANTILEVERS; THIN FILM DEVICES; TIME SWITCHES;

SWITCHES;

EID: 66649093526     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/EMICC.2008.4772309     Document Type: Conference Paper

References (6)

1. R.E. Mihailovich, M. Kim, J.B. Hacker, E.A. Sovero, J. Studer , J.A. Higgins, and J.F. Denatale, "MEMS relay for reconfigurable RF circuits" IEEE Microwave Wireless Comp. Lett., Vol.11, No. 2, pp. 53- 55, Feb. 2001.
2. M. Kim, J.B. Hacker, R.E. Mihailovich, and J.F. Denatale, "A DC-to-40 GHz Four-Bit RF MEMS True-Time Delay Network" IEEE Microwave Wireless Comp. Lett., Vol. 11, No. 2, pp. 56-58, Feb. 2001. (Pubitemid 33076101)
3. G.-L. Tan, R. E. Mihailovich, J. B. Hacker, J. F. DeNatale, and G. M. Rebeiz, "Low-Loss 2- and 4-bit TTD MEMS Phase Shifters Based on SP4T Switches", IEEE Transactions On Microwave Theory And Techniques, Vol. 51, No. 1, Jan., 2003
4. P. M. Zavracky, N. E. McGruer, R. H. Morrison and D. Porter, "Microswitches and microrelays with a view toward microwave applications," Int J. RF Microwave CAE,.Vo\. 9, No. 4, pp. 338-347, 1999.
5. J. R. Stanec, M. R. Begley, and N. S. Barker, "Mechanical Properties of Sacrificial Polymers used in RF-MEMS applications," Journal of Micromechanics and Microengineering, pp. 2086-2091, Oct. 2006. (Pubitemid 44403658)
6. J. R. Stanec, C. H. Smith III, I. Chasiotis and N. S. Barker, "Realization of low-stress Au cantilever beams," Journal of Micromechanics and Microengineering, pp. N7-N10, Feb., 2007. (Pubitemid 46778511)