XPS study of the surface composition modification of nc-TiC/C nanocomposite films under in situ argon ion bombardment

Thin Solid Films

Volumn 519, Issue 12, 2011, Pages 3982-3985

  El Mel, A A ^a   Angleraud, B ^a,b   Gautron, E ^a   Granier, A ^a   Tessier, P Y ^a  

^a UNIVERSITÉ DE NANTES   (France)

^b NONE   (France)

Author keywords

Carbon; Sputtering; Thin films; TiC; Titanium; XPS

Indexed keywords

ARGON; CARBON; CARBON FILMS; CHEMICAL ANALYSIS; CHEMICAL MODIFICATION; ENERGY DISPERSIVE X RAY ANALYSIS; NANOCOMPOSITE FILMS; NANOCOMPOSITES; PHYSICAL VAPOR DEPOSITION; PLASMA CVD; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SPUTTERING; SURFACE ANALYSIS; THIN FILMS; TITANIUM; TITANIUM CARBIDE; TITANIUM COMPOUNDS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON CONTAMINATION; CHEMICAL COMPOSITIONS; CHEMICAL INFORMATION; NANOCOMPOSITE SAMPLES; SURFACE ANALYSIS TECHNIQUES; SURFACE CHEMICAL COMPOSITION; SURFACE CONTAMINATIONS; SURFACE OXIDATIONS;

ION BOMBARDMENT;

EID: 79953705637     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.01.200     Document Type: Article

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