Sculpturing of photonic crystals by ion beam lithography: Towards complete photonic bandgap at visible wavelengths

Optics Express

Volumn 19, Issue 7, 2011, Pages 5802-5810

  Juodkazis, Saulius ^a   Rosa, Lorenzo ^a   Bauerdick, Sven ^b   Peto, Lloyd ^b   El Ganainy, Ramy ^c   John, Sajeev ^c  

^a SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

^b Raith GmbH   (Germany)

^c UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ENERGY GAP; ION BEAMS; OXIDE MINERALS; SPONTANEOUS EMISSION; STRUCTURAL OPTIMIZATION; THREE DIMENSIONAL; TITANIUM DIOXIDE;

3D PATTERNING; 3D PHOTONIC CRYSTALS; 3D STRUCTURE; CRYSTALLINE TITANIA; DIRECT WRITE; MASK LESS; PORE DIAMETERS; SLANTED PORES; STRUCTURAL PARAMETER; THREE-DIMENSIONAL (3D); TITANIA; VISIBLE SPECTRAL RANGE; VISIBLE WAVELENGTHS;

PHOTONIC CRYSTALS;

ION; TITANIUM; TITANIUM DIOXIDE;

ARTICLE; CHEMISTRY; CRYSTALLIZATION; LIGHT; MATERIALS TESTING; METHODOLOGY; PHOTOGRAPHY; PHOTON; RADIATION EXPOSURE; REFRACTOMETRY; SURFACE PROPERTY;

CRYSTALLIZATION; IONS; LIGHT; MATERIALS TESTING; PHOTOGRAPHY; PHOTONS; REFRACTOMETRY; SURFACE PROPERTIES; TITANIUM;

EID: 79953185433     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.19.005802     Document Type: Article

References (27)

1. S. John, "Strong localization of photons in certain disordered dielectric superlattices," Phys. Rev. Lett. 58, 2486-2489 (1987).
2. E. Yablonovitch, "Inhibited spontaneous emission in solid-state physics and electronics," Phys. Rev. Lett. 58, 2059-2062 (1987).
3. S. John, "Loalization of light: Theory of photonic band gap materials," in Photonic band gap materials, C. Sokoulis, ed. (Kluwer, The Netherlands, 1996).
4. J. D. Joannopoulos, P. R. Villeneuve, and S. Fan, "Photonic crystals: Putting a new twist on light," Nature 386, 143-149 (1997). (Pubitemid 27131435)
5. S. Johnson and J. D. Joannopoulos, Photonic crystals: The Road From Theory to Practice (Kluwer, Dordrecht, The Netherlands, 2002).
6. T. F. Krauss and R. M. de La Rue, "Photonic crystals in the optical regime - past, present and future," Prog. Quantum Electron. 23, 51-96 (1999).
7. S. Kitson, W. Barnes, and J. Sambles, "Full Photonic Band Gap for Surface Modes in the Visible," Phys. Rev. Lett. 77, 2670-2673 (1996). (Pubitemid 126624112)
8. A. Blanco, E. Chomski, S. Grabtchak, M. Ibisate, S. John, S. Leonard, C. Lopez, F. Meseguer, H. Miguez, J. Mondia, G. Ozin, O. Toader, and H. van Driel, "Large-scale synthesis of a silicon photonic crystal with a complete three-dimensional bandgap near 1.5 micrometres," Nature 405, 437-40 (2000). (Pubitemid 30367415)
9. E. Yablonovitch, "Photonic band-gap structures," J. Opt. Soc. Am. 10, 283-295 (1993).
10. A. Tandaechanurat, S. Ishida, D. Guimard, M. Nomura, S. Iwamoto, and Y. Arakawa, "Lasing oscillation in a three-dimensional photonic crystal nanocavity with a complete bandgap," Nat. Photon. 5, 91-94 (2011).
11. N. Tétreault, G. von Freymann, M. Deubel, M. Hermatschweiler, F. Pérez-Willard, S. John, M. Wegener, and G. Ozin, "New route to three-dimensional photonic bandgap materials: Silicon double inversion of polymer templates," Adv. Mater. 18, 457-460 (2005).
12. K. K. Seet, V. Mizeikis, K. Kannari, S. Juodkazis, H. Misawa, N. Tetreault, and S. John, "Templating and replication of spiral photonic crystals for silicon photonics," IEEE J. Selec. Topics Quant Electr. 14, 1064-1073 (2008).
13. F. B. McCormick, J. G. Fleming, S. Mani, M. R. Tuck, J. D.Williams, C. L. Arrington, S. H. Kravitz, C. Schmidt, G. Subramania, J. C. Verley, A. R. Ellis, I. El-kady, D. W. Peters, M. W. W. C. Sweatt, and J. J. Hudgens, "Fabrication and characterization of large-area 3-D photonic crystals," in IEEE Aerospace Conf. Proc., 1820-1827 (2006).
14. J. Schilling and A. Scherer, "3D photonic crystals based on macroporous silicon: Towards a large complete photonic bandgap," Photon. Nanostr.: Fund. and Appl. 3, 90-95 (2005). (Pubitemid 41706239)
15. 2 photonic crystal for light control at near-UV and visible wavelengths," Adv. Mater. 22, 487-491 (2010).
16. S. Juodkazis, V. Mizeikis, K. K. Seet, H. Misawa, and U. G. K. Wegst, "Mechanical properties and tuning of three-dimensional polymeric photonic crystals," Appl. Phys. Lett. 91, 241904 (2007).
17. T. Kondo, S. Juodkazis, and H. Misawa, "Reduction of capillary force for high-aspect ratio nanofabrication," Appl. Phys. A 81, 1583-1586 (2005). (Pubitemid 41521282)
18. S. Juodkazis, V. Mizeikis, K. K. Seet, M. Miwa, and H. Misawa, "Two-photon lithography of nanorods in SU-8 photoresist," Nanotechnol. 16, 846-849 (2005). (Pubitemid 40666593)
19. O. Toader and S. John, "Slanted-pore photonic band-gap materials," Phys. Rev. E 71, 036605 (2005).
20. J. Winkler, Titanium dioxide (Vincentz Network, Hannover, 2003).
21. E. D. Palik, ed., Handbook of Optical Constants of Solids (Academic Press, New York, 1985).
22. T. Dai, X. Kang, B. Zhang, J. Xu, K. Bao, C. Xiong, and Z. H. Gan, "Study and formation of 2D microstructures of sapphire by focused ion beam milling," Microelectr. Eng. 85, 640-645 (2008).
23. S. Takahashi, K. Suzuki, M. Okano, M. Imada, T. Nakamori, Y. Ota, K. Ishizaki, and S. Noda, "Direct creation of three-dimensional photonic crystals by a top-down approach," Nat. Mater. 8, 721-725 (2009).
24. L. Tang and T. Yoshie, "Woodpile photonic crystal fabricated in GaAs by two-directional etching method," J. Vac. Sci. Technol. B 28, 301-303 (2010).
25. A. Chutinan, S. John, and O. Toader, "Diffractionless flow of light in all-optical microchips," Phys. Rev. Lett. 90, 123901 (2003).
26. A. Chutinan and S. John, "Light trapping and absorption optimization in certain thin-film photonic crystal architectures," Phys. Rev. B 78, 023825 (2008).
27. S. John and R. Z.Wang, "Metallic photonic-band-gap filament architectures for optimized incandescent lighting," Phys. Rev. A 78, 043809 (2008).