Direct creation of three-dimensional photonic crystals by a top-down approach

Nature Materials

Volumn 8, Issue 9, 2009, Pages 721-725

  Takahashi, Shigeki ^a   Suzuki, Katsuyoshi ^a   Okano, Makoto ^a   Imada, Masahiro ^a   Nakamori, Takeshi ^a   Ota, Yuji ^a   Ishizaki, Kenji ^a   Noda, Susumu ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

D REGION; DEFECTS; PHOTONIC CRYSTALS; SPONTANEOUS EMISSION;

3D PHOTONIC CRYSTALS; LIGHT EMITTERS; OPTICAL WAVELENGTH; PHOTONIC BANDGAP EFFECT; SINGLE CRYSTALLINE SILICON; THREE DIMENSIONAL (3D) PHOTONIC CRYSTALS; THREE DIMENSIONAL PHOTONIC CRYSTALS; TOP DOWN APPROACHES;

CRYSTAL DEFECTS;

EID: 69249229761     PISSN: 14761122     EISSN: 14764660     Source Type: Journal    
DOI: 10.1038/nmat2507     Document Type: Article

References (20)

1. Yablonovitch, E. Inhibited spontaneous emission in solid-state physics and electronics. Phys. Rev. Lett. 58, 2059-2062 (1987).
2. Noda, S., Tomoda, K., Yamamoto, N. & Chutinan, A. Full three-dimensional photonic bandgap crystals at ne-infred wavelengths. Science 289, 604-606 (2000).
3. Ogawa, S., Imada, M., Yoshimoto, S., Okano, M. & Noda, S. Control of light emission by 3D photonic crystals. Science 305, 227-229 (2004).
4. Fleming, J. G. & Lin, S. Y. Three-dimensional photonic crystal with a stop band from 1.35 to 1:95 -m. Opt. Lett. 24, 49-51 (1999).
5. Qi, M. et al. A three-dimensional optical photonic crystal with designed point defects. Nature 429, 538-542 (2004).
6. Aoki, K. et al. Coupling of quantum-dot light emission with a three-dimensional photonic-crystal nanocavity. Nature Photon. 2, 688-692 (2008).
7. Blanco, A. et al. Lge-scale synthesis of a silicon photonic crystal with a complete three-dimensional bandgap ne 1.5 micrometres. Nature 405, 437-440 (2000).
8. Vlasov, Y. A., Bo, X. Z., Sturm, J. C. & Norris, D. J. On-chip natural assembly of silicon photonic bandgap crystals. Nature 414, 289-293 (2001).
9. Lodahl, P. et al. Controlling the dynamics of spontaneous emission from quantum dots by photonic crystals. Nature 430, 654-657 (2004).
10. Rinne, S. A., Gcía-Santamía, F. & Braun, P. V. Embedded cavities and waveguides in three-dimensional silicon photonic crystals. Nature Photon. 2, 52-56 (2008).
11. Ramanan, V., Nelson, E., Brzezinski, A., Braun, P. V. & Wiltzius, P. Three dimensional silicon-air photonic crystals with controlled defects using interference lithography. Appl. Phys. Lett. 92, 173304 (2008).
12. Cheng, C. C., bet-Engels, V., Scherer, A. & Yablonovitch, E. Nanofabricated three dimensional photonic crystals operating at optical wavelengths. Phys. Scr. T68, 17-20 (1996).
13. Chelnokov, A. et al. Fabrication of 2-D and 3-D silicon photonic crystals by deep etching. IEEE J. Sel. Top. Quant. 8, 919-927 (2002).
14. Schilling, J. et al. Three-dimensional macroporous silicon photonic crystal with lge photonic band gap. Appl. Phys. Lett. 86, 011101 (2005).
15. Takahashi, S., Okano, M., Imada, M. & Noda, S. Three-dimensional photonic crystals based on double-angled etching and wafer-fusion techniques. Appl. Phys. Lett. 89, 123106 (2006).
16. Tjerkstra, R. W., Segerink, F. B., Kelly, J. J. & Vos, W. L. Fabrication of three-dimensional nanostructures by focused ion beam milling. J. Vac. Sci. Technol. B 26, 973-977 (2008).
17. Toader, O., Berciu, M. & John, S. Photonic band gaps based on tetragonal lattices of slanted pores. Phys. Rev. Lett. 90, 233901 (2003).
18. Chutinan, A. & Noda, S. Effects of structural fluctuations on the photonic bandgap during fabrication of a photonic crystal. J. Opt. Soc. Am. B 16, 240-244 (1999).
19. Ishizaki, K., Okano, M. & Noda, S. Numerical investigation of emission in finite-sized three-dimensional photonic crystals with structural fluctuations. J. Opt. Soc. Am. B 26, 1157-1161 (2009).
20. Fang, A. W. et al. Electrically pumped hybrid AlGaInAs-silicon evanescent laser. Opt. Express 14, 9203-9210 (2006).