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Volumn 32, Issue 4, 2011, Pages 455-457

Filamentation mechanism of resistive switching in fully silicided High-κ gate stacks

Author keywords

Metal filament; oxygen vacancy; resistive random access memory (RRAM); switching

Indexed keywords

FILAMENTATION; FULLY SILICIDED; GATE STACKS; MEMORY APPLICATIONS; METAL FILAMENTS; METAL GATE TRANSISTORS; PSEUDO RANDOM; RESISTIVE RANDOM ACCESS MEMORY (RRAM); RESISTIVE SWITCHING; SILICON CHANNEL; SOURCE/DRAIN SILICIDES; TEST STRUCTURE; TRANSISTOR STRUCTURE;

EID: 79953063302     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2011.2107495     Document Type: Article
Times cited : (14)

References (13)
  • 2
    • 43749088059 scopus 로고    scopus 로고
    • Sub-100-μA reset current of nickel oxide resistive memory through control of filamentary conductance by current limit of MOSFET
    • DOI 10.1109/TED.2008.919385
    • Y. Sato, K. Tsunoda, K. Kinoshita, H. Noshiro, M. Aoki, and Y. Sugiyama, "Sub-100-μA reset current of nickel oxide resistive memory through control of filamentary conductance by current limit of MOSFET," IEEE Trans. Electron Devices, vol. 55, no. 5, pp. 1185-1191, May 2008. (Pubitemid 351689510)
    • (2008) IEEE Transactions on Electron Devices , vol.55 , Issue.5 , pp. 1185-1191
    • Sato, Y.1    Tsunoda, K.2    Kinoshita, K.3    Noshiro, H.4    Aoki, M.5    Sugiyama, Y.6
  • 4
    • 78649276205 scopus 로고    scopus 로고
    • Resistive switching in NiSi gate metal-oxide-semiconductor transistors
    • Nov.
    • X. Li, W. H. Liu, N. Raghavan, M. Bosman, and K. L. Pey, "Resistive switching in NiSi gate metal-oxide-semiconductor transistors," Appl. Phys. Lett., vol. 97, no. 20, pp. 202 904-1-202 904-3, Nov. 2010.
    • (2010) Appl. Phys. Lett. , vol.97 , Issue.20 , pp. 2029041-2029043
    • Li, X.1    Liu, W.H.2    Raghavan, N.3    Bosman, M.4    Pey, K.L.5
  • 5
    • 67349240351 scopus 로고    scopus 로고
    • High-κ for MIM and RRAM applications: Impact of the metallic electrode and oxygen vacancies
    • Jul.-Sep.
    • C. Vallée, P. Gonon, C. Jorel, F. El Kamel, M. Mougenot, and V. Jousseaume, "High-κ for MIM and RRAM applications: Impact of the metallic electrode and oxygen vacancies," Microelectron. Eng., vol. 86, no. 7-9, pp. 1774-1776, Jul.-Sep. 2009.
    • (2009) Microelectron. Eng. , vol.86 , Issue.7-9 , pp. 1774-1776
    • Vallée, C.1    Gonon, P.2    Jorel, C.3    El Kamel, F.4    Mougenot, M.5    Jousseaume, V.6
  • 6
    • 77952809255 scopus 로고    scopus 로고
    • Conduction behavior change in amorphous LaLuO3 dielectrics based on correlated barrier hopping theory
    • May
    • K. Li, Y. Xia, B. Xu, X. Gao, H. Guo, Z. Liu, and J. Yin, "Conduction behavior change in amorphous LaLuO3 dielectrics based on correlated barrier hopping theory," Appl. Phys. Lett., vol. 96, no. 18, pp. 182 904-1-182 904-3, May 2010.
    • (2010) Appl. Phys. Lett. , vol.96 , Issue.18 , pp. 1829041-1829043
    • Li, K.1    Xia, Y.2    Xu, B.3    Gao, X.4    Guo, H.5    Liu, Z.6    Yin, J.7
  • 7
    • 33747905416 scopus 로고    scopus 로고
    • Relation between breakdown mode and location in short-channel nmosfets and its impact on reliability specifications
    • PII S1530438801107249
    • R. Degraeve, B. Kaczer, A. D. Keersgieter, and G. Groeseneken, "Relation between breakdown mode and location in short-channel nMOSFETs and its implication on reliability specifications," IEEE Trans. Device Mater. Rel., vol. 1, no. 3, pp. 163-169, Sep. 2001. (Pubitemid 33778210)
    • (2001) IEEE Transactions on Device and Materials Reliability , vol.1 , Issue.3 , pp. 163-169
    • Degraeve, R.1    Kaczer, B.2    De Keersgieter, A.3    Groeseneken, G.4
  • 8
    • 34547214324 scopus 로고    scopus 로고
    • Nano-characterisation of dielectric breakdown in the various advanced gate stack MOSFETs
    • DOI 10.1504/IJNT.2007.013971
    • K. L. Pey, C. H. Tung, R. Ranjan, V. L. Lo, M. Mackenzie, and A. J. Craven, "Nano-characterisation of dielectric breakdown in the various advanced gate stack MOSFETs," Int. J. Nanotechnol., vol. 4, no. 4, pp. 347-376, 2007. (Pubitemid 47114502)
    • (2007) International Journal of Nanotechnology , vol.4 , Issue.4 , pp. 347-376
    • Pey, K.L.1    Tung, C.H.2    Ranjan, R.3    Lo, V.L.4    MacKenzie, M.5    Craven, A.J.6
  • 9
    • 67650733296 scopus 로고    scopus 로고
    • Formulation of multiple conductive filaments in the Cu/ZrO2 : Cu/Pt device
    • Jul.
    • Q. Liu, C. Dou, Y. Wang, S. Long, W. Wang, M. Liu, M. Zhang, and J. Chen, "Formulation of multiple conductive filaments in the Cu/ZrO2 : Cu/Pt device," Appl. Phys. Lett., vol. 95, no. 2, pp. 023 501-1-023 501-3, Jul. 2009.
    • (2009) Appl. Phys. Lett. , vol.95 , Issue.2 , pp. 0235011-0235013
    • Liu, Q.1    Dou, C.2    Wang, Y.3    Long, S.4    Wang, W.5    Liu, M.6    Zhang, M.7    Chen, J.8
  • 10
    • 77951199639 scopus 로고    scopus 로고
    • Unipolar recovery of dielectric breakdown in fully silicided high-κ gate stack devices and its reliability implications
    • Apr
    • N. Raghavan, K. L. Pey, W. H. Liu, X.Wu, and X. Li, "Unipolar recovery of dielectric breakdown in fully silicided high-κ gate stack devices and its reliability implications," Appl. Phys. Lett., vol. 96, no. 14, pp. 42 901-1-42 901-3, Apr 2010.
    • (2010) Appl. Phys. Lett. , vol.96 , Issue.14 , pp. 429011-429013
    • Raghavan, N.1    Pey, K.L.2    Liu, W.H.3    Wu, X.4    Li, X.5
  • 11
    • 77956428388 scopus 로고    scopus 로고
    • Observation of switching behaviors in post-breakdown conduction in NiSi-gated stacks
    • W. H. Liu, K. L. Pey, X. Li, and M. Bosman, "Observation of switching behaviors in post-breakdown conduction in NiSi-gated stacks," in IEDM Tech. Dig., 2009, pp. 135-138.
    • (2009) IEDM Tech. Dig. , pp. 135-138
    • Liu, W.H.1    Pey, K.L.2    Li, X.3    Bosman, M.4
  • 12
    • 74549193388 scopus 로고    scopus 로고
    • Direct visualization and in-depth physical study of metal filament formation in percolated high-κ dielectrics
    • Jan.
    • X. Li, K. L. Pey, M. Bosman, W. H. Liu, and T. Kauerauf, "Direct visualization and in-depth physical study of metal filament formation in percolated high-κ dielectrics," Appl. Phys. Lett., vol. 96, no. 2, pp. 022 903-1-022 903-3, Jan. 2010.
    • (2010) Appl. Phys. Lett. , vol.96 , Issue.2 , pp. 0229031-0229033
    • Li, X.1    Pey, K.L.2    Bosman, M.3    Liu, W.H.4    Kauerauf, T.5
  • 13
    • 4944239019 scopus 로고    scopus 로고
    • Size effects on the melting of nickel nanowires: A molecular dynamics study
    • Oct.
    • Y. H.Wen, Z. Z. Zhu, R. Zhu, and G. F. Shao, "Size effects on the melting of nickel nanowires: A molecular dynamics study," Phys. E, vol. 25, no. 1, pp. 47-54, Oct. 2004.
    • (2004) Phys. e , vol.25 , Issue.1 , pp. 47-54
    • Wen, H.Y.1    Zhu, Z.Z.2    Zhu, R.3    Shao, G.F.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.