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Volumn 33, Issue 2, 2010, Pages 343-353

Chemisorption reaction mechanisms for atomic layer deposition of high-κ oxides on high mobility channels

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM OXIDE; ATOMS; CALCULATIONS; CHEMISORPTION; HALL MOBILITY; HOLE MOBILITY; SEMICONDUCTING GERMANIUM;

EID: 79952548400     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3485270     Document Type: Conference Paper
Times cited : (8)

References (17)
  • 12
    • 84872123436 scopus 로고    scopus 로고
    • version 7.1.G
    • Alex A. Granovsky, Firefly version 7.1.G, http://classic.chem.msu.su/ gran/firefly/index.html.
    • Firefly
    • Granovsky, A.A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.