Raman scattering spectroscopy of residual stresses in epitaxial AlN films

Applied Physics Express

Volumn 4, Issue 3, 2011, Pages

  Yang, Shibo ^a   Miyagawa, Reina ^a   Miyake, Hideto ^a   Hiramatsu, Kazumasa ^a   Harima, Hiroshi ^b  

^a MIE UNIVERSITY   (Japan)

^b KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALN; BIAXIAL STRESS; DATA ANALYSIS; DEFORMATION POTENTIAL; EPITAXIAL ALN; HIGH RESOLUTION X RAY DIFFRACTION; HYDRIDE VAPOR PHASE EPITAXY; LATTICE STRAIN; METAL-ORGANIC VAPOR PHASE EPITAXY; PEAK SHIFT; PHONON FREQUENCIES; PHONON MODE; RAMAN SCATTERING SPECTROSCOPY; WURTZITES;

DATA REDUCTION; EPITAXIAL GROWTH; METALLORGANIC VAPOR PHASE EPITAXY; PHONONS; RAMAN SCATTERING; STRAIN; VAPORS; X RAY DIFFRACTION; ZINC SULFIDE;

EPITAXIAL FILMS;

EID: 79952531681     PISSN: 18820778     EISSN: 18820786     Source Type: Journal    
DOI: 10.1143/APEX.4.031001     Document Type: Article

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