Raman spectroscopy of sputtered AIN films: E2(high) biaxial strain dependence

Applied Physics Letters

Volumn 89, Issue 6, 2006, Pages

  Trodahl, H J ^a,b   Martin, F ^a   Muralt, P ^a   Setter, N ^a  

^a EPFL   (Switzerland)

^b VICTORIA UNIVERSITY OF WELLINGTON   (New Zealand)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; NATURAL FREQUENCIES; RAMAN SPECTROSCOPY; SPUTTERING; STRAIN GAGES; STRAIN RATE;

AIN FILMS; C-AXIS FILMS; MODE FREQUENCIES; ZONE CENTER LINES;

THIN FILMS;

EID: 33747092692     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2335582     Document Type: Article

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